JPS6249153U - - Google Patents

Info

Publication number
JPS6249153U
JPS6249153U JP1985138669U JP13866985U JPS6249153U JP S6249153 U JPS6249153 U JP S6249153U JP 1985138669 U JP1985138669 U JP 1985138669U JP 13866985 U JP13866985 U JP 13866985U JP S6249153 U JPS6249153 U JP S6249153U
Authority
JP
Japan
Prior art keywords
recess
pellicle frame
handhold
attachment
removal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1985138669U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985138669U priority Critical patent/JPS6249153U/ja
Publication of JPS6249153U publication Critical patent/JPS6249153U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図イ，ロは本考案に係るペリクルフレーム
の一実施例の斜視図および断面図、第２図イ，ロ
は別の実施例の斜視図および断面図、第３図イ，
ロはさらに別の実施例の斜視図および断面図、第
４図イ，ロは従来例の斜視図および断面図である
。 １０…ペリクルフレーム、１３…凹部。

Claims (1)

    【実用新案登録請求の範囲】
  1. 装着又は撤去の手懸り用凹部を有するペリクル
    フレームにおいて、前記凹部の断面底部が円弧形
    状に成形されていることを特徴とするペリクルフ
    レーム。
JP1985138669U 1985-09-12 1985-09-12 Pending JPS6249153U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985138669U JPS6249153U (ja) 1985-09-12 1985-09-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985138669U JPS6249153U (ja) 1985-09-12 1985-09-12

Publications (1)

Publication Number Publication Date
JPS6249153U true JPS6249153U (ja) 1987-03-26

Family

ID=31043859

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985138669U Pending JPS6249153U (ja) 1985-09-12 1985-09-12

Country Status (1)

Country Link
JP (1) JPS6249153U (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101930167A (zh) * 2009-06-24 2010-12-29 信越化学工业株式会社 防护膜框架及光刻用防护膜
JP2011197125A (ja) * 2010-03-17 2011-10-06 Asahi Kasei E-Materials Corp 大型ペリクル
JP2016062055A (ja) * 2014-09-22 2016-04-25 信越化学工業株式会社 ペリクルフレームおよびペリクル
JP2017134093A (ja) * 2016-01-25 2017-08-03 日本特殊陶業株式会社 ペリクル枠およびペリクル枠の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59210441A (ja) * 1983-05-13 1984-11-29 Hitachi Ltd ホトマスク用基板

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59210441A (ja) * 1983-05-13 1984-11-29 Hitachi Ltd ホトマスク用基板

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101930167A (zh) * 2009-06-24 2010-12-29 信越化学工业株式会社 防护膜框架及光刻用防护膜
JP2011007935A (ja) * 2009-06-24 2011-01-13 Shin-Etsu Chemical Co Ltd ペリクルフレーム及びリソグラフィ用ペリクル
JP2011197125A (ja) * 2010-03-17 2011-10-06 Asahi Kasei E-Materials Corp 大型ペリクル
JP2016062055A (ja) * 2014-09-22 2016-04-25 信越化学工業株式会社 ペリクルフレームおよびペリクル
JP2017134093A (ja) * 2016-01-25 2017-08-03 日本特殊陶業株式会社 ペリクル枠およびペリクル枠の製造方法

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