JPS6247422B2 - - Google Patents
Info
- Publication number
- JPS6247422B2 JPS6247422B2 JP22145482A JP22145482A JPS6247422B2 JP S6247422 B2 JPS6247422 B2 JP S6247422B2 JP 22145482 A JP22145482 A JP 22145482A JP 22145482 A JP22145482 A JP 22145482A JP S6247422 B2 JPS6247422 B2 JP S6247422B2
- Authority
- JP
- Japan
- Prior art keywords
- curing
- inert gas
- coating film
- container
- liquefied
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000576 coating method Methods 0.000 claims description 27
- 239000011261 inert gas Substances 0.000 claims description 25
- 239000011248 coating agent Substances 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 9
- 230000002265 prevention Effects 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 30
- 238000001723 curing Methods 0.000 description 16
- 229910052757 nitrogen Inorganic materials 0.000 description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 9
- 239000001301 oxygen Substances 0.000 description 9
- 229910052760 oxygen Inorganic materials 0.000 description 9
- 239000007788 liquid Substances 0.000 description 5
- 238000001816 cooling Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 2
- 238000009834 vaporization Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000006385 ozonation reaction Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/06—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Coating Apparatus (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22145482A JPS59112870A (ja) | 1982-12-16 | 1982-12-16 | 塗膜の硬化方法およびその装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22145482A JPS59112870A (ja) | 1982-12-16 | 1982-12-16 | 塗膜の硬化方法およびその装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59112870A JPS59112870A (ja) | 1984-06-29 |
| JPS6247422B2 true JPS6247422B2 (da) | 1987-10-07 |
Family
ID=16766973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22145482A Granted JPS59112870A (ja) | 1982-12-16 | 1982-12-16 | 塗膜の硬化方法およびその装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59112870A (da) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020037695A (ko) | 2000-11-14 | 2002-05-22 | 히가시 데쓰로 | 기판 처리장치 및 기판 처리방법 |
| WO2006077995A1 (en) | 2005-01-18 | 2006-07-27 | Fujifilm Corporation | Transparent film and method for manufacturing the same, polarized plate and image display device |
| WO2006095885A1 (en) | 2005-03-07 | 2006-09-14 | Fujifilm Corporation | Antireflective film, method of manufucturing antireflective film, polarizing plate and image display device using the same |
| JP4680149B2 (ja) * | 2006-08-23 | 2011-05-11 | 東京エレクトロン株式会社 | 塗布処理方法、プログラム、コンピュータ読み取り可能な記録媒体及び塗布処理装置 |
-
1982
- 1982-12-16 JP JP22145482A patent/JPS59112870A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59112870A (ja) | 1984-06-29 |
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