JPS6247095Y2 - - Google Patents

Info

Publication number
JPS6247095Y2
JPS6247095Y2 JP9507982U JP9507982U JPS6247095Y2 JP S6247095 Y2 JPS6247095 Y2 JP S6247095Y2 JP 9507982 U JP9507982 U JP 9507982U JP 9507982 U JP9507982 U JP 9507982U JP S6247095 Y2 JPS6247095 Y2 JP S6247095Y2
Authority
JP
Japan
Prior art keywords
chamber
constant temperature
testing
under test
bias
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9507982U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59970U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9507982U priority Critical patent/JPS59970U/ja
Publication of JPS59970U publication Critical patent/JPS59970U/ja
Application granted granted Critical
Publication of JPS6247095Y2 publication Critical patent/JPS6247095Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
JP9507982U 1982-06-24 1982-06-24 半導体素子試験用恒温槽 Granted JPS59970U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9507982U JPS59970U (ja) 1982-06-24 1982-06-24 半導体素子試験用恒温槽

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9507982U JPS59970U (ja) 1982-06-24 1982-06-24 半導体素子試験用恒温槽

Publications (2)

Publication Number Publication Date
JPS59970U JPS59970U (ja) 1984-01-06
JPS6247095Y2 true JPS6247095Y2 (enrdf_load_stackoverflow) 1987-12-24

Family

ID=30227235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9507982U Granted JPS59970U (ja) 1982-06-24 1982-06-24 半導体素子試験用恒温槽

Country Status (1)

Country Link
JP (1) JPS59970U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6142478U (ja) * 1984-08-24 1986-03-19 沖電気工業株式会社 半導体装置のバ−ンイン装置

Also Published As

Publication number Publication date
JPS59970U (ja) 1984-01-06

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