JPS6246267A - 振動センサ - Google Patents

振動センサ

Info

Publication number
JPS6246267A
JPS6246267A JP60186109A JP18610985A JPS6246267A JP S6246267 A JPS6246267 A JP S6246267A JP 60186109 A JP60186109 A JP 60186109A JP 18610985 A JP18610985 A JP 18610985A JP S6246267 A JPS6246267 A JP S6246267A
Authority
JP
Japan
Prior art keywords
piezoelectric element
bonded
vibrator
bonded piezoelectric
vibration sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60186109A
Other languages
English (en)
Japanese (ja)
Other versions
JPH052173B2 (cg-RX-API-DMAC7.html
Inventor
Tetsuji Fukada
深田　哲司
Masayuki Wakamiya
若宮　正行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60186109A priority Critical patent/JPS6246267A/ja
Publication of JPS6246267A publication Critical patent/JPS6246267A/ja
Publication of JPH052173B2 publication Critical patent/JPH052173B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
JP60186109A 1985-08-24 1985-08-24 振動センサ Granted JPS6246267A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60186109A JPS6246267A (ja) 1985-08-24 1985-08-24 振動センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60186109A JPS6246267A (ja) 1985-08-24 1985-08-24 振動センサ

Publications (2)

Publication Number Publication Date
JPS6246267A true JPS6246267A (ja) 1987-02-28
JPH052173B2 JPH052173B2 (cg-RX-API-DMAC7.html) 1993-01-11

Family

ID=16182516

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60186109A Granted JPS6246267A (ja) 1985-08-24 1985-08-24 振動センサ

Country Status (1)

Country Link
JP (1) JPS6246267A (cg-RX-API-DMAC7.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4995592A (en) * 1988-12-22 1991-02-26 Foseco International Limited Purifying molten metal
JP2009053087A (ja) * 2007-08-28 2009-03-12 Yamaha Corp モーションセンサおよびモーションセンサの製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4995592A (en) * 1988-12-22 1991-02-26 Foseco International Limited Purifying molten metal
JP2009053087A (ja) * 2007-08-28 2009-03-12 Yamaha Corp モーションセンサおよびモーションセンサの製造方法

Also Published As

Publication number Publication date
JPH052173B2 (cg-RX-API-DMAC7.html) 1993-01-11

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