JPS6246057B2 - - Google Patents
Info
- Publication number
- JPS6246057B2 JPS6246057B2 JP57092899A JP9289982A JPS6246057B2 JP S6246057 B2 JPS6246057 B2 JP S6246057B2 JP 57092899 A JP57092899 A JP 57092899A JP 9289982 A JP9289982 A JP 9289982A JP S6246057 B2 JPS6246057 B2 JP S6246057B2
- Authority
- JP
- Japan
- Prior art keywords
- mark
- electron beam
- electron
- signal
- alignment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
- H01J37/3045—Object or beam position registration
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57092899A JPS58210615A (ja) | 1982-05-31 | 1982-05-31 | 電子ビ−ムを用いたマ−ク位置測定方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57092899A JPS58210615A (ja) | 1982-05-31 | 1982-05-31 | 電子ビ−ムを用いたマ−ク位置測定方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58210615A JPS58210615A (ja) | 1983-12-07 |
| JPS6246057B2 true JPS6246057B2 (show.php) | 1987-09-30 |
Family
ID=14067308
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57092899A Granted JPS58210615A (ja) | 1982-05-31 | 1982-05-31 | 電子ビ−ムを用いたマ−ク位置測定方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58210615A (show.php) |
-
1982
- 1982-05-31 JP JP57092899A patent/JPS58210615A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58210615A (ja) | 1983-12-07 |
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