JPS6244435U - - Google Patents
Info
- Publication number
- JPS6244435U JPS6244435U JP13526185U JP13526185U JPS6244435U JP S6244435 U JPS6244435 U JP S6244435U JP 13526185 U JP13526185 U JP 13526185U JP 13526185 U JP13526185 U JP 13526185U JP S6244435 U JPS6244435 U JP S6244435U
- Authority
- JP
- Japan
- Prior art keywords
- photo
- reaction chamber
- pressure oil
- vapor pressure
- cvd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 3
- 230000002265 prevention Effects 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 2
- 239000012495 reaction gas Substances 0.000 claims 2
- 239000010408 film Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13526185U JPH058670Y2 (cs) | 1985-09-04 | 1985-09-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13526185U JPH058670Y2 (cs) | 1985-09-04 | 1985-09-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6244435U true JPS6244435U (cs) | 1987-03-17 |
| JPH058670Y2 JPH058670Y2 (cs) | 1993-03-04 |
Family
ID=31037276
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13526185U Expired - Lifetime JPH058670Y2 (cs) | 1985-09-04 | 1985-09-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH058670Y2 (cs) |
-
1985
- 1985-09-04 JP JP13526185U patent/JPH058670Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH058670Y2 (cs) | 1993-03-04 |
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