JPS6242442Y2 - - Google Patents

Info

Publication number
JPS6242442Y2
JPS6242442Y2 JP1981187777U JP18777781U JPS6242442Y2 JP S6242442 Y2 JPS6242442 Y2 JP S6242442Y2 JP 1981187777 U JP1981187777 U JP 1981187777U JP 18777781 U JP18777781 U JP 18777781U JP S6242442 Y2 JPS6242442 Y2 JP S6242442Y2
Authority
JP
Japan
Prior art keywords
shielding plate
electron beam
conductive plates
elastic pieces
electrically conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981187777U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5891850U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18777781U priority Critical patent/JPS5891850U/ja
Publication of JPS5891850U publication Critical patent/JPS5891850U/ja
Application granted granted Critical
Publication of JPS6242442Y2 publication Critical patent/JPS6242442Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Shutters For Cameras (AREA)
  • Electron Sources, Ion Sources (AREA)
JP18777781U 1981-12-16 1981-12-16 電子顕微鏡等のシヤツタ−装置 Granted JPS5891850U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18777781U JPS5891850U (ja) 1981-12-16 1981-12-16 電子顕微鏡等のシヤツタ−装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18777781U JPS5891850U (ja) 1981-12-16 1981-12-16 電子顕微鏡等のシヤツタ−装置

Publications (2)

Publication Number Publication Date
JPS5891850U JPS5891850U (ja) 1983-06-21
JPS6242442Y2 true JPS6242442Y2 (en:Method) 1987-10-30

Family

ID=29990868

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18777781U Granted JPS5891850U (ja) 1981-12-16 1981-12-16 電子顕微鏡等のシヤツタ−装置

Country Status (1)

Country Link
JP (1) JPS5891850U (en:Method)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5839006Y2 (ja) * 1978-12-28 1983-09-02 日本電子株式会社 電子顕微鏡等のシヤツタ−装置

Also Published As

Publication number Publication date
JPS5891850U (ja) 1983-06-21

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