JPS6242383Y2 - - Google Patents

Info

Publication number
JPS6242383Y2
JPS6242383Y2 JP18588982U JP18588982U JPS6242383Y2 JP S6242383 Y2 JPS6242383 Y2 JP S6242383Y2 JP 18588982 U JP18588982 U JP 18588982U JP 18588982 U JP18588982 U JP 18588982U JP S6242383 Y2 JPS6242383 Y2 JP S6242383Y2
Authority
JP
Japan
Prior art keywords
electron beam
backscattered
reflective surface
edge portion
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18588982U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5989276U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18588982U priority Critical patent/JPS5989276U/ja
Publication of JPS5989276U publication Critical patent/JPS5989276U/ja
Application granted granted Critical
Publication of JPS6242383Y2 publication Critical patent/JPS6242383Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Electron Sources, Ion Sources (AREA)
JP18588982U 1982-12-08 1982-12-08 電子ビ−ム径測定治具 Granted JPS5989276U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18588982U JPS5989276U (ja) 1982-12-08 1982-12-08 電子ビ−ム径測定治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18588982U JPS5989276U (ja) 1982-12-08 1982-12-08 電子ビ−ム径測定治具

Publications (2)

Publication Number Publication Date
JPS5989276U JPS5989276U (ja) 1984-06-16
JPS6242383Y2 true JPS6242383Y2 (enrdf_load_stackoverflow) 1987-10-30

Family

ID=30401662

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18588982U Granted JPS5989276U (ja) 1982-12-08 1982-12-08 電子ビ−ム径測定治具

Country Status (1)

Country Link
JP (1) JPS5989276U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5989276U (ja) 1984-06-16

Similar Documents

Publication Publication Date Title
US4201475A (en) Device/process for contact free distance and thickness measurement
JPH03123811A (ja) シート厚さ測定装置
JPS6242383Y2 (enrdf_load_stackoverflow)
EP0599807A1 (en) Position detector
JPH0311753Y2 (enrdf_load_stackoverflow)
JPS5630724A (en) Inspecting device of substrate surface
JPS5543487A (en) Inclination detection coarseness measuring method through light reflection
JPS57211733A (en) Detecting device for electron beam exposing marker
JP3091276B2 (ja) 変位測定装置
JPS5948322B2 (ja) 移動面の端部検出装置
JPH0729452Y2 (ja) 変位測定装置
JPH05829Y2 (enrdf_load_stackoverflow)
JPS601431Y2 (ja) 物体検出装置
JPS60230022A (ja) ホツパ−内面レベルの測定方法
JPH0641131Y2 (ja) 直接反射方式エンコ−ダ
JP4300496B2 (ja) 光学式プロフィル測定方法と装置
JPS6275203A (ja) 目地幅の検出方法
JP3104104B2 (ja) 光磁気ディスク装置用ギャップセンサ
JPH0610827U (ja) レーザ光および電子ビームの検出器
JPS648614U (enrdf_load_stackoverflow)
JPS6452119U (enrdf_load_stackoverflow)
JPH10221011A (ja) 三次元計測方法
JPS5940107A (ja) 距離測定装置
JPS6322731U (enrdf_load_stackoverflow)
JPH03110688U (enrdf_load_stackoverflow)