JPS6242383Y2 - - Google Patents
Info
- Publication number
- JPS6242383Y2 JPS6242383Y2 JP18588982U JP18588982U JPS6242383Y2 JP S6242383 Y2 JPS6242383 Y2 JP S6242383Y2 JP 18588982 U JP18588982 U JP 18588982U JP 18588982 U JP18588982 U JP 18588982U JP S6242383 Y2 JPS6242383 Y2 JP S6242383Y2
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- backscattered
- reflective surface
- edge portion
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 30
- 238000005259 measurement Methods 0.000 claims description 3
- 230000004069 differentiation Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 7
- 238000013459 approach Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18588982U JPS5989276U (ja) | 1982-12-08 | 1982-12-08 | 電子ビ−ム径測定治具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18588982U JPS5989276U (ja) | 1982-12-08 | 1982-12-08 | 電子ビ−ム径測定治具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5989276U JPS5989276U (ja) | 1984-06-16 |
| JPS6242383Y2 true JPS6242383Y2 (enrdf_load_html_response) | 1987-10-30 |
Family
ID=30401662
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18588982U Granted JPS5989276U (ja) | 1982-12-08 | 1982-12-08 | 電子ビ−ム径測定治具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5989276U (enrdf_load_html_response) |
-
1982
- 1982-12-08 JP JP18588982U patent/JPS5989276U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5989276U (ja) | 1984-06-16 |
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