JPS5989276U - 電子ビ−ム径測定治具 - Google Patents

電子ビ−ム径測定治具

Info

Publication number
JPS5989276U
JPS5989276U JP18588982U JP18588982U JPS5989276U JP S5989276 U JPS5989276 U JP S5989276U JP 18588982 U JP18588982 U JP 18588982U JP 18588982 U JP18588982 U JP 18588982U JP S5989276 U JPS5989276 U JP S5989276U
Authority
JP
Japan
Prior art keywords
beam diameter
electron beam
reflective portion
diameter measurement
measurement jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18588982U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6242383Y2 (enrdf_load_html_response
Inventor
安部　忠廣
一三 森本
渡辺　忠悟
佐藤　光義
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Iseki and Co Ltd
Original Assignee
Iseki and Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Iseki and Co Ltd filed Critical Iseki and Co Ltd
Priority to JP18588982U priority Critical patent/JPS5989276U/ja
Publication of JPS5989276U publication Critical patent/JPS5989276U/ja
Application granted granted Critical
Publication of JPS6242383Y2 publication Critical patent/JPS6242383Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
JP18588982U 1982-12-08 1982-12-08 電子ビ−ム径測定治具 Granted JPS5989276U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18588982U JPS5989276U (ja) 1982-12-08 1982-12-08 電子ビ−ム径測定治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18588982U JPS5989276U (ja) 1982-12-08 1982-12-08 電子ビ−ム径測定治具

Publications (2)

Publication Number Publication Date
JPS5989276U true JPS5989276U (ja) 1984-06-16
JPS6242383Y2 JPS6242383Y2 (enrdf_load_html_response) 1987-10-30

Family

ID=30401662

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18588982U Granted JPS5989276U (ja) 1982-12-08 1982-12-08 電子ビ−ム径測定治具

Country Status (1)

Country Link
JP (1) JPS5989276U (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPS6242383Y2 (enrdf_load_html_response) 1987-10-30

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