JPS6241793A - シリコン単結晶引上げ用ルツボ - Google Patents
シリコン単結晶引上げ用ルツボInfo
- Publication number
- JPS6241793A JPS6241793A JP17724285A JP17724285A JPS6241793A JP S6241793 A JPS6241793 A JP S6241793A JP 17724285 A JP17724285 A JP 17724285A JP 17724285 A JP17724285 A JP 17724285A JP S6241793 A JPS6241793 A JP S6241793A
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- silicon nitride
- cylinder
- single crystal
- pulling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 16
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 16
- 239000010703 silicon Substances 0.000 title claims abstract description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 15
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 26
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 26
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 20
- 239000010453 quartz Substances 0.000 claims abstract description 19
- UMVBXBACMIOFDO-UHFFFAOYSA-N [N].[Si] Chemical compound [N].[Si] UMVBXBACMIOFDO-UHFFFAOYSA-N 0.000 claims 1
- 230000001681 protective effect Effects 0.000 abstract description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 229910005091 Si3N Inorganic materials 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Glass Melting And Manufacturing (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17724285A JPS6241793A (ja) | 1985-08-12 | 1985-08-12 | シリコン単結晶引上げ用ルツボ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17724285A JPS6241793A (ja) | 1985-08-12 | 1985-08-12 | シリコン単結晶引上げ用ルツボ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6241793A true JPS6241793A (ja) | 1987-02-23 |
| JPH0573720B2 JPH0573720B2 (enrdf_load_stackoverflow) | 1993-10-14 |
Family
ID=16027635
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17724285A Granted JPS6241793A (ja) | 1985-08-12 | 1985-08-12 | シリコン単結晶引上げ用ルツボ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6241793A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008115056A (ja) * | 2006-11-07 | 2008-05-22 | Covalent Materials Corp | シリコン溶融ルツボおよびこれに用いる離型材 |
| CN118109895A (zh) * | 2024-04-30 | 2024-05-31 | 安徽壹石通材料科技股份有限公司 | 一种氮化硅/熔融石英复合坩埚及其制备方法与应用 |
-
1985
- 1985-08-12 JP JP17724285A patent/JPS6241793A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008115056A (ja) * | 2006-11-07 | 2008-05-22 | Covalent Materials Corp | シリコン溶融ルツボおよびこれに用いる離型材 |
| CN118109895A (zh) * | 2024-04-30 | 2024-05-31 | 安徽壹石通材料科技股份有限公司 | 一种氮化硅/熔融石英复合坩埚及其制备方法与应用 |
| CN118109895B (zh) * | 2024-04-30 | 2024-08-13 | 安徽壹石通材料科技股份有限公司 | 一种氮化硅/熔融石英复合坩埚及其制备方法与应用 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0573720B2 (enrdf_load_stackoverflow) | 1993-10-14 |
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