JPS6241410A - Corpuscular stream controller - Google Patents

Abstract

PURPOSE:To enable corpuscles to be easily sprayed to a desired area on a substrate by installing a contraction/expansion nozzle with free titling movement along a pass of a stream controller. CONSTITUTION:A contraction/expansion nozzle 1 with a throat part 2 is installed between an upstream chamber 3 and a downstream chamber 4. A bellows leading to the upstream chamber 3 is connected to an inflow port 1a of the contraction/expansion nozzle 1, and a tilting movement part linked to driving motors 40a, 40b is provided in the center of the contraction/expansion nozzle 1. Therefore, when carrier gas containing corpuscles is supplied to the upstream chamber 3, and the contraction/expansion nozzle 1 is titled to the horizontal and vertical direction by the driving motors 40a, 40b, it is possible to spray carrier gas to a desired position on a substrate 6.

Description

Detailed Description of the Invention [Industrial Application Field] The present invention relates to a flow control device for a particulate flow, which is used as a means for transporting or spraying particulates. It is expected to be applied to the formation of composite materials, doping, and new formation sites for fine particles.

In this specification, fine particles refer to atoms and molecules.

Refers to ultrafine particles and general fine particles. What are ultrafine particles here?
For example, in-gas evaporation method, plasma evaporation method, vaporization '7: reaction method using gas phase reaction, colloidal precipitation method, solution spray pyrolysis method, etc. using liquid phase reaction, etc. Refers to the ultrafine (generally 0.5 gm or less) particles obtained. - General fine particles refer to fine particles obtained by a general f method such as mechanical crushing or precipitation treatment.

Furthermore, a beam refers to a jet stream whose cross-sectional area is approximately constant in the flow direction, and its cross-sectional shape is not limited.

[Prior Art] Generally, fine particles are dispersed and suspended in a carrier gas and transported by the flow of the carrier gas.

Conventionally, control of the flow of particulates accompanying the transfer of L particulates has been carried out by dividing the entire flow path of the particulates flowing together with the carrier scum using a pipe material or a casing, based on the differential pressure between the A flow side and the F flow side. It's nothing more than that. Therefore, although the flow of particles varies in strength and weakness, the flow of particles inevitably occurs in a state where they are dispersed throughout the interior of the li° material or casing that partitions the flow path of the particles.

Furthermore, in a table or the like for blowing fine particles onto a substrate, the fine particles are jetted out along with a carrier gas through a nozzle. The nozzle used to spray the fine particles is simply a parallel tube or a tapered nozzle, and the jet cross section of the fine particles immediately after being ejected is certainly narrowed down according to the area of the nozzle end face. However, since the jet is diffused at the exit surface of the nozzle, the flow path is merely temporarily constricted, and the speed of the jet does not exceed the speed of sound.

Problems to be solved by the C invention
If the fine particles are transported along this flow path together with the carrier gas by the differential pressure between the flow side and the downstream side, a very high transport speed cannot be expected. Further, it is difficult to avoid contact between the particles and the wall surface of the tube or casing that defines the flow path of the particles throughout the entire transfer section.

For this reason, there is a problem in that, particularly when moving active fine particles to a collection position, the activity tends to disappear over time or due to contact with the tube material or the wall surface of the casing.

In addition, if the entire flow path of particles is divided by pipe material or housing,
Due to the generation of dead space in the flow, the collection rate of the transported particles decreases, and the utilization efficiency of the carrier gas for transporting the fine particles also decreases.

- On the other hand, in the conventional 11-row pipe or tapered nozzle, the density of particles 4j in the jet flow that has passed is large, resulting in a diffused flow. Therefore,
When spraying fine particles onto a substrate, it may be difficult to control uniform spraying. Further, in the conventional device, since the nozzle was fixed, it was not possible to arbitrarily set the spray area.

[Means for Solving the Problems] The measures taken to solve the problems mentioned above are explained with reference to FIG. 1, which is an explanatory diagram of the basic principle of the present invention. A contracting/expanding nozzle 1 is provided in between, and a telescopic bellows 30 is provided at the inlet port 1a of the contracting/expanding nozzle 1 to make the contracting/expanding nozzle tiltable. Drive motors 40a and 40b are provided, and the angle of the contraction/expansion nozzle 1 with respect to the base body 6 is controlled by rotation of these two motors.

The contraction/expansion nozzle 1 in the present invention is a throat portion 2 in which the opening area is gradually narrowed from the inlet 1a toward the middle portion, and the opening area is gradually expanded from the throat portion 2 toward the outlet 1b. This refers to the nozzle that is In Figure 1,
For convenience of explanation, the inflow side and outflow side of the contraction/expansion nozzle l are as follows:
It is connected to an upstream chamber 3 and a downstream chamber 4, each of which is a closed system. However, the inflow side and the outflow side of the contraction/expansion nozzle 1 in the present invention can be a closed system if a differential pressure can be generated between the two and the particles can be passed along with the carrier gas while being exhausted on the downstream side. It may also be an open system.

[Function] For example, as shown in FIG.
When the inside is evacuated by the vacuum pump 5, a pressure difference is created between the upstream chamber 3 and the downstream chamber 4. Therefore, the supplied carrier gas containing fine particles flows from the upstream chamber 3 through the contraction/expansion nozzle 1 and flows into the downstream chamber 4 .

By the way, the contraction/expansion nozzle 1 has a pressure ratio P/PO between the pressure Po of the upstream chamber 3 and the pressure P of the downstream chamber 4, and the opening area A'' of the throat section 2 and the opening area A of the outflow Dlb. By setting the ratio A/A to 3 Jm, the flow of fine particles ejected together with the gear gas can be increased.
If the internal pressure ratio P/Pc of the upstream chamber 4 is larger than the critical pressure ratio, the flow velocity at the outlet of the contraction/expansion nozzle l becomes sub-a speed or lower, and the fine particles are decelerated and ejected together with the carrier gas.

Further, if the L distribution pressure ratio is equal to or greater than the critical pressure ratio, the outlet flow velocity of the contraction/expansion nozzle 1 becomes a supersonic flow, and the fine particles can be ejected together with the carrier gas at an extremely high speed.

Here, the velocity of the particle flow is U, and the sound velocity at that point is a.
, the specific heat ratio of the particle flow is γ, and the particle flow is compressible -1
Assuming that the particle flow expands adiabatically in a -dimensional flow, the Matsuha number M reached by the particle flow is determined by the following equation from Lf7if, the pressure po in the chamber, and the pressure P in the downstream chamber, especially when P/PO is the critical pressure ratio In this case, M is 1 or more and 1-.

Note that the sound velocity a can be determined by the following equation, where T is the local temperature and R is the gas constant.

a=F71薯" Also, the opening area A of the outflow hole 1b and the opening area A of the throat part 2
・and Matsuha's number M have the following relationship.

Therefore, the opening area ratio A/A'' can be determined according to the Matsuha number M determined from equation (1) by the pressure ratio P/PO of the pressure Po in the upstream chamber 3 and the pressure P in the downstream chamber 4, or by A/A''. By adjusting P/Po according to M determined from equation (2), the flow velocity of the particulate flow ejected from the expansion/contraction nozzle 1 can be adjusted. The velocity U of the particle flow at this time can be determined by the following equation (3).

The flow state of the particle flow is JO:, Ii, and the pressure in chamber 3 is p.

By keeping the pressure ratio P/P of the pressure P of the upstream chamber 4 and the pressure P of the upstream chamber 4 constant, a constant state determined by the opening area ratio A/A.

When the pressure ratio is less than the critical pressure ratio as mentioned above, the ejected carrier gas and particles form a uniform diffusion flow, making it possible to uniformly spray the particles over a relatively wide area at once. .

On the other hand, when particles are ejected in a fixed direction along with carrier gas as an ultra-high-speed flow as described above, the carrier gas and particles travel straight while maintaining almost the jet cross section immediately after ejection.
Beamed. Therefore, the flow of particles carried by this carrier gas is also converted into a beam, which moves through the space in the downstream chamber 4 with minimal diffusion, spatially alone without interference with the wall surface of the upstream chamber 4, and It will be transported at super high speed.

For this reason, it is possible, for example, to form active particles in the upstream chamber 3 and transfer them directly into a beam through the contraction/expansion nozzle 1, or to activate them within the contraction/expansion nozzle 1 or immediately after the contraction/expansion nozzle l. By forming fine particles having a particle size and transferring them as a beam, it is possible to transfer them as a spatially independent beam at supersonic speed.
For example, the base body 61 provided in the downstream chamber 4. It can be collected by adhering to. Therefore, it becomes possible to collect fine particles in a good active state. Further, since the fine particles are sprayed onto the substrate 6I as a beam whose jet cross section is substantially constant in the flow direction, the spraying area can be accurately defined. Furthermore, the contraction/expansion nozzle 1 can be tilted to any vertical or water-moist angular position by rotating the motor shown in FIG. 1, making it possible to spray onto a desired area on the base 6.

[Example] Fig. 2 is a schematic diagram of an example in which the present invention is applied to a film forming apparatus using a-fine particles.
is an upstream chamber, 4a is a first downstream chamber, and 4b is a second downstream chamber.

The L flow chamber 3 and the first downstream chamber 4a are constructed as an integrated unit, and the skimmer 7, gate valve 8, and second downstream chamber 4b, which are also unitized, are provided in the first T flow chamber 4a. All of them are sequentially connected to each other so that they can be connected and separated through flanges having a common diameter (hereinafter referred to as "common flanges"). The l::ti chamber 3, the first downstream chamber 4a, and the second downstream chamber 4b are maintained at a higher degree of vacuum in steps from the upstream chamber 3 to the second downstream chamber 4b by an exhaust system described later. It is.

A gas phase excitation device 9 is attached to the -=- side of the upstream chamber 3 via a common flange. This gas phase excitation device 9 is
In addition to generating active ultrafine particles using plasma,
For example, the a-fine particles are sent out together with a carrier gas such as hydrogen, helium, argon, nitrogen, etc. to the contraction/expansion nozzle 1 located on the opposite side. In order to prevent the formed ultrafine particles from adhering to the inner surface of the north flow chamber 3, an adhesion prevention treatment may be applied to the inner surface. Furthermore, since the first flow chamber 4d has a higher degree of vacuum than the upstream chamber 3, the generated ultrafine particles directly flow through the contraction/expansion nozzle 1 together with the carrier gas due to the pressure difference between the two. and flows to the first downstream chamber 4a.

As shown in FIG. 3(a), the gas phase excitation device 9 includes a rod-shaped first electrode 9a disposed within a tubular second electrode 9b, and a carrier gas and a raw material gas supplied into the second electrode 9b. Thus, a discharge is caused between both electrodes 9a and 9b. Further, the gas phase excitation device 9, as shown in FIG. 3(b),
The first electrode 8a provided in the second electrode sb is made into a porous tube, and the carrier gas and source gas are supplied between the two electrodes 9a and 9b through the inside of the first electrode 9a. As shown, both half-tubular electrodes 9a, 9
b are joined in a tubular shape via an insulating material 9C, and both electrodes 9a,
It is also possible to supply the carrier gas and source gas into the tube formed by 9b.

As described above, the contraction/expansion nozzle 1 is configured to be tiltable by means of a bellows, a driving motor, and the like. FIG. 4 shows a schematic configuration of a drive device including the nozzle 1.

In the figure, the contraction/expansion nozzle 1 is connected to a bellows 30 at its inlet port la side, and is supported by a bracket 50 by a shaft 51 provided on the left and right side surfaces of the intermediate portion of the main body. A motor 40 is attached to one end of the bracket 50.
a is arranged and connected to the shaft 51 via a predetermined rotation transmission mechanism (not shown). On the other hand, bracket 5
A motor 40b is arranged on the F side of 0 and is fixed within the downstream chamber 4a. The motor 40b is connected to the shaft 52 via a predetermined rotation transmission mechanism (not shown).

In the L configuration, when the motor 40a is rotated in the direction of the arrow in the figure, the nozzle 1 is tilted in the vertical direction centering on the shirt 51, and when the motor 40b is rotated in the direction of the arrow, the nozzle 1 is tilted in the vertical direction. ) Tilt in the direction of water flow every 50 seconds.

As mentioned above, the contraction/expansion nozzle 1 has an inlet port 1a.
It is sufficient that the open area is gradually narrowed to form the throat 2, and the opening area is gradually expanded again to form the outlet 1b, but the open area of the throat 2 is as follows: The nozzle flow rate is determined to be smaller than the exhaust flow rate of the vacuum pump 5a under the required pressure and temperature of the flow chamber 3. As a result, the outlet 1b is properly expanded, and deceleration, etc. at the outlet 1b can be prevented. Further, as shown in an enlarged view in FIG. 5(a), it is preferable that the inner circumferential surface near the outlet lb is substantially parallel to the central axis. This is because the flow direction of the jetted carrier gas and ultrafine particles is influenced to some extent by the direction of the inner peripheral surface near the outlet lb.
This is to make parallel flow as easy as possible. However, as shown in FIG. 5(b), if the angle α of the inner circumferential surface from the throat portion 2 to the outflow plb with respect to the central axis is set to 7° or less, preferably 5° or less, the peeling phenomenon is less likely to occur. Since the flow of the ejected carrier gas and ultrafine particles is maintained substantially uniformly, in this case, it is not necessary to form the above-mentioned parallel portions. By omitting the formation of the parallel portion, the contraction/expansion nozzle 1 can be manufactured easily.

Furthermore, if the contraction/expansion nozzle 1 is made rectangular as shown in FIG. 5(C), carrier gas and ultrafine particles can be ejected in a slit shape.

Here, the separation phenomenon is a phenomenon in which when there is a protrusion or the like on the inner surface of the contraction/expansion nozzle 1, the boundary layer between the inner surface of the contraction/expansion nozzle 1 and the flowing fluid becomes large and the flow becomes non-uniform. The faster the jet flow, the more likely it is to occur. In order to prevent this smearing phenomenon, it is preferable that the above-mentioned angle α is made smaller as the inner surface finishing viscosity of the contraction/expansion nozzle 1 is inferior. The inner surface of the contraction/expansion nozzle 1 is JIS B
0801, it is preferable that the inverted triangular mark representing the surface finish h If accuracy be less than or equal to L, and optimally more than four. In particular, since the separation phenomenon in the enlarged part of the contraction/expansion nozzle 1 has a strong influence on the subsequent flow of carrier gas and ultrafine particles, by determining the two-way finishing accuracy with emphasis on this enlarged part, The reduction/expansion nozzle 1 can be manufactured easily. Furthermore, in order to prevent the occurrence of the 211-dimensional phenomenon, the throat portion 2 must have a smooth curved surface so that the differential coefficient in the rate of change in cross-sectional area does not become (1).

The material of the contraction/expansion nozzle l is, for example, iron.

In addition to stainless steel and other metals, acrylic resin,
A wide variety of materials can be used, including synthetic resins such as polyvinyl chloride, polyethylene, polystyrene, and polypropylene, ceramic materials, quartz, and glass. This material may be selected in consideration of non-reactivity with the generated ultrafine particles, processability, gas release properties in a vacuum system, etc. Furthermore, the inner surface of the contraction/expansion nozzle l can be plated or coated with a material that is less likely to cause adhesion or reaction of ultrafine particles. Specific examples include polyfluoroethylene coating.

The length of the contraction/expansion nozzle l can be arbitrarily determined depending on the size of the apparatus and the like. By the way, the contraction/expansion nozzle l
When flowing through the carrier gas and l1fl particles, the thermal energy they possess is converted into kinetic energy. Particularly when ejected at supersonic speed, the thermal energy becomes significantly small, resulting in a supercooled state. Therefore, if the carrier gas contains condensed components, it is also possible to actively condense them in the supercooled state, thereby forming ultrafine particles. Due to this a
Since the formation of microparticles is homogeneous nucleation.

Easy to obtain homogeneous ultrafine particles. Further, in this case, it is preferable that the contraction/expansion nozzle 1 be long in order to perform adequate condensation. On the other hand, when condensation occurs as described above, thermal energy increases and velocity energy decreases. Therefore, in order to maintain high-speed jetting, it is preferable that the contraction/expansion nozzle l be short.

Pressure ratio P/P of pressure Po in upstream chamber 3 and pressure P in downstream chamber 4
By appropriately adjusting the relationship between A and the ratio A/A◆ of the opening surface vIA'' of the throat portion 2 and the opening area of the outlet 1b, and flowing through the contraction/expansion nozzle l, the ultrafine particles The carrier gas containing .

The sugimer 7 is arranged in the first downstream chamber 4 so that the first second downstream chamber 4b can maintain a sufficiently higher degree of vacuum than the first downstream chamber 4a.
This is to enable the opening area between the second downstream chamber 4b and the second downstream chamber 4b to be adjusted. Specifically, as shown in FIG. 6, two adjustment plates 11.11', each having a dogleg-shaped cutout 10.10', can be slid past each other with the cutout 10.10' facing each other. It has been established in These adjusting plates 11° and 11° can be slid from the outside, and can be adjusted depending on the degree of overlap between the two cutout sections 10 and 10'.
The opening is adjusted to allow the passage of the beam and maintain a sufficient degree of vacuum in the second downstream chamber. Note that the shapes of the notch 10.10' and the adjustment plate 11.11' of the skimmer 7 may be semicircular or other shapes other than the shape shown in the drawings.

The gate valve 8 has a valve body 13 that can be raised and lowered by turning a handle 12, and is open when the beam is traveling. By closing this gate valve 8, the unit in the first downstream chamber 4b can be replaced while maintaining the degree of vacuum in the upstream chamber 3 and the first downstream chamber 4a. In addition, in the apparatus of this embodiment, ultrafine particles are collected in the second downstream chamber 4b, but if the gate valve 8 is closed with a pole valve, etc., the ultrafine particles are particularly susceptible to oxidation, such as gold 11 and fine particles. Sometimes, by replacing the unit of the first knee flow chamber 4b together with the Pall valve, there is an advantage that the unit can be replaced without the risk of sudden anti-aging effects.

A base body 6 is located in the second F flow chamber 4b for receiving and depositing ultrafine particles transferred as a beam, and collecting the ultrafine particles in a fully formed state. This base body 6 is attached to the second downstream chamber 4b via a common flange, and is attached to a base body holder 16 at the tip of a slide shaft 15 that is slid by a cylinder 14. A shutter 17 is located on the front side of the base 6, so that the beam can be blocked whenever necessary. Further, the substrate holder 16 holds the substrate 6 under optimum temperature conditions for collection of a-fine particles.
can be heated or cooled.

Incidentally, glass windows 18 are attached to the upper and lower sides of the upstream chamber 3 and the second downstream chamber 4b through common flanges, respectively, as shown in the figure, so that the inside can be observed. Although not shown, the upstream chamber 3. -F flow chamber 4a
Similar glass windows (similar to 18 in the figure) are also installed at the front and rear of the second downstream chamber via common flanges. These glass windows 18 can be removed and replaced with various measuring devices, load lock chambers, etc. via a common flange.

Next, the exhaust system in this embodiment will be explained.

1: The flow chamber 3 is connected to the main valve 20a via the pressure regulating valve 19. The first downstream chamber 4a is directly connected to the main valve 20a.
a is connected to a vacuum pump 5a. The second TK'' flow chamber 4b is connected to the main valve 20b, and the main/help 2C1b is further connected to the vacuum pump 5b.
0a, immediately upstream of 20b is a barb valve 22a,
22b, and the auxiliary valve 2
3a.

This is a decompression pump connected to the vacuum pump 5a via 23b, and is used to check the insides of the upstream chamber 3, the F-th flow chamber 4a, and the second R-flow chamber 4b. In addition, 24a to 24h are
Each chamber 3, 4a, 4b and pump 5a, 5b, 2
1a and 21b are leak and purge valves.

First, the interference valves 21a and 21b and the pressure regulating valve 1
8 is opened, 1-, the flow chamber 3, the - and second downstream chambers 4a,
4b is carried out using vacuum pumps 20a and 20b. Next, close the control valves 21a and 21b,
Auxiliary valves 23a, 23b and main valve 20a,
20b is opened and the upstream chamber 3 is opened using the vacuum pumps 5a and 5b.
, the inside of the first and second downstream chambers 4a and 4b is made to have a sufficient degree of vacuum. At this time, by adjusting the pressure and the opening degree of the 1ll Jffi valve 19, the degree of vacuum in the first downstream chamber 4a is made higher than that in the upstream chamber 3, and then the carrier gas and raw material gas are flowed, and then The skimmer 7 is used to adjust the degree of vacuum in the second downstream chamber 4b. This iA adjustment can also be performed by adjusting the opening degree of the main valve 20b. The chambers 3, 4a, and 4b are controlled to maintain a constant degree of vacuum throughout the formation of ultrafine particles and the film forming operation by beam injection. This control can be done manually, but
The pressure inside each chamber 3, 4a, 4b is detected, and based on this detected pressure, the pressure regulating valve 19, the main valve 20a,
20b, the skimmer 7'v may be dynamically controlled to open and close. Moreover, if the carrier gas and fine particles supplied to the upstream chamber 3 are directly transferred to the downstream side via the contraction/expansion nozzle l, the exhaust gas during transfer will be transferred to the downstream side, that is, the Only the first flow chambers 4a and 4b may be treated.

The emptyness may be controlled by separately providing vacuum pumps 5a for the upstream chamber 3 and the 'F'th flow chamber 4a for each chamber 3, 4a. However, as in this embodiment, if one vacuum pump 5a is used to evacuate in the direction of beam flow and the degree of vacuum in the upstream chamber 3 and the downstream chamber 4a is controlled,
Even if there is some pulsation in the vacuum pump 5a, the pressure difference between the two can be easily maintained at -. Therefore, there is an advantage that it is easy to maintain a constant flow state that is susceptible to fluctuations in differential pressure.

It is preferable that the suction by the vacuum pumps 5a, 5b is performed from the h side, especially in the first and second flow chambers 4a, 4b. By suctioning from the L side, it is possible to prevent the beam from falling due to gravity to some extent.

Although the apparatus according to this embodiment is as described above, the following modifications can be made.

First, the contraction/expansion nozzle 1 is formed of an insulator such as a quartz cap, and microwaves are applied thereto to form active Mi fine particles p inside the contraction/expansion nozzle 1. Alternatively, the flow can be irradiated with light having various wavelengths, such as laser light. Also.

It is also possible to provide a plurality of contraction/expansion nozzles 1 to generate a plurality of beams at once. In particular, when a plurality of contraction/expansion nozzles 1 are provided, by connecting each one to an independent flow chamber 3, beams of different particles can be run simultaneously, allowing stacking or mixed collection of different particles. , it is also possible to form new particles by collision of different particles by intersecting the beams.

The base body 6 is held movably or rotatably from side to side under L,
It is also possible to receive the beam over a wide range. Further, by winding up the base body 6 into a roll and sending it out one after another so as to receive the beam, a long base body 6 can also be treated with fine particles. Furthermore, the treatment with fine particles may be performed while rotating the drum-shaped base 6.

In this embodiment, the first generation chamber 3, the first flow chamber 4a, and the second
Although it is composed of a flow chamber 4b, the second downstream chamber 4b may be omitted, or a third downstream chamber may be provided on the downstream side of the first downstream chamber.

Fourth...downstream chambers can also be connected. Further, by pressurizing the hR chamber 3, the first downstream chamber 4d can be made into an open system, and by reducing the pressure in the first downstream chamber 4a, the E flow chamber 3 can be made into an open system. In particular, like an autoclave, it is also possible to pressurize the L flow chamber 3 and reduce the pressure in the first downstream chamber 4a to F.

In this embodiment, active ultrafine particles are formed in the upstream chamber 3, but this is not necessarily necessary, and separately formed particles may be sent to the f flow chamber 3 together with the carrier gas. Further, it is also possible to provide a valve for opening and closing the contraction/expansion nozzle l, and to obtain fine particles by intermittently opening and closing the hysteresis valve while temporarily storing fine particles in the upstream chamber 3 side. By opening and closing the L valve in synchronization with the energy application performed on the downstream side including the throat portion 2 of the contraction/expansion nozzle 1, the load on the exhaust system can be significantly reduced, and the raw material gas can be used effectively. A pulsed particle flow can be obtained. Note that under the same exhaust conditions, the above-mentioned intermittent opening and closing has the advantage that it is easier to maintain a high vacuum on the downstream side. In case of intermittent opening and closing,
A chamber for temporarily storing fine particles may be provided between the L flow chamber 3 and the contraction/expansion nozzle l.

In addition, multiple contraction/expansion nozzles l are arranged in series and the pressure ratio on the upstream side and downstream side is adjusted to maintain the beam speed, and each chamber is made spherical to minimize the generation of dead space. It can also be prevented.

[Effects of the Invention] According to the present invention, fine particles can be transported as a uniformly dispersed supersonic beam.

Microparticles can be transported spatially independently and at ultrahigh speeds. Therefore, the spraying area on the substrate 6 can be defined accurately. Furthermore, since the contraction/expansion nozzle can be tilted vertically and horizontally, the base 6
The spray can be applied to the desired area on the top. Also,
It is possible to obtain a new reaction field by making use of the fact that it becomes a focused ultra-high-speed parallel flow called a beam, and that when it is made into a beam, thermal energy is converted to kinetic energy, and the particles in the beam become frozen. We also have high expectations for this. Further, according to the flow control device of the present invention, since the fluid is in the frozen state, it is also possible to define the microscopic state of molecules in the fluid and handle the transition from one state to another state. In other words, it is possible to perform chemical reactions in the gas phase using a new method in which various energy levels of molecules are defined and energy corresponding to the levels is imparted. Furthermore, by providing a field for energy exchange different from conventional ones, it is also possible to easily create intermolecular compounds formed by relatively weak intermolecular forces such as hydrogen bonds and van der Waals bonds.

[Brief explanation of the drawing]

Figure 1 is an explanatory diagram of the basic principle of the present invention, Figure 2 is a schematic diagram showing an embodiment of the present invention applied to a film forming apparatus using ultrafine particles, and Figures 3 (a) to (C) are FIG. 4 is a schematic diagram of the drive device, and FIG. 5 is a diagram showing an example of a gas phase excitation device.
a) to (C) are diagrams each showing an example of the shape of a reduction/enlargement nozzle;
FIG. 6 is an explanatory diagram of the skimmer. l: wJ small, small, thick, large nozzle 1a: inlet, lb = outlet,
2: throat, 3 flow chambers, 4: downstream chamber, 4a: first downstream chamber, 4b = second downstream chamber, 5, 5a, 5b: vacuum pump,
6: Base, 7: Skimmer, 8: Gate valve. 9: Gas phase excitation device, Sa: first electrode, 8b: second electrode, 10.10': notch, 11, 11'
: Adjustment plate, 12: Handle, 13: Valve body. 14 Niji cylinder, 15 Ni slide axis, 16: Substrate holder, 17: Shutter, 1 day Ni glass window, 19: Pressure adjustment valve, 20a, 20b: Main valve, 21a, 21b: G pressure pump. 22a, 22b: Arabiki/< rub, 23a, 2
3b: Auxiliary valve, 24a to 24h: Leak and purge/personnel valve, 30:
Heroes, 40a, 40b: Motor, 50
:bracket. 51, 52: Shaft.

Claims (1)

[Claims] 1) A flow control device for a particle flow, characterized in that a tiltable contraction/expansion nozzle is provided in a flow path.