JPS61223313A - Minute particle flow controller - Google Patents

Abstract

PURPOSE:To obtain plural stripes of uniform flows of minute particles and the flow beams consisting of the minute particles by installing a plurality of contraction and expansion nozzles into a flow passage. CONSTITUTION:A plurality of contraction and expansion nozzles 1 in which the opened port area is gradually reduced from an inflow port 1a to form a throat part 2 and the opened port area is gradually increased towards an effluence port 1b from the throat part 2 are installed into a flow passage. With such constitution, plural stripes of uniform flows of minute particles can be obtained, and the minute particles can be sprayed uniformly over the wide range on a substrate 6.

Description

Detailed Description of the Invention [Field of Industrial Application] The present invention relates to a flow control device for a particle flow that is used as a means for transporting or spraying particles. It is expected to be applied to the formation of composite materials, doping processing, and new formation sites for fine particles.

In this specification, fine particles refer to atoms and molecules.

Refers to ultrafine particles and general fine particles. What are ultrafine particles here?
For example, in-gas evaporation method, plasma evaporation method, gas phase chemical reaction method, which utilizes gas phase reaction, and even liquid phase reaction,
Refers to ultrafine particles (generally 0.5 gm or less) obtained by colloidal precipitation methods, solution spray pyrolysis methods, etc. General fine particles refer to fine particles obtained by a general f method such as mechanical crushing or precipitation treatment. Furthermore, a beam refers to a jet stream whose cross-sectional area is approximately constant in the flow direction, and its cross-sectional shape does not matter.

[Prior Art] Fine particles in one shell are dispersed and suspended in a carrier gas and transported by the flow of the carrier gas.

Conventionally, the control of the flow of fine particles accompanying the transport of the fine particles described in
This is simply achieved by dividing the entire flow path of the particles flowing together with the carrier gas with a pipe or a housing based on the differential pressure between the flow side and the downstream side. Therefore, although the flow of particles varies in strength and weakness, the flow of particles inevitably occurs in a dispersed state throughout the pipe material or casing that defines the flow path for particles.

Furthermore, when spraying fine particles onto a substrate, the fine particles are jetted out together with a carrier gas through a nozzle. The nozzle used for spraying the fine particles is a wide parallel tube or a tapered nozzle, and the jet cross section of the fine particles immediately after being ejected is narrowed according to the area of the nozzle end face. However, since the jet is diffused at the exit surface of the nozzle, the flow path is simply narrowed down temporarily, and the speed of the jet does not exceed the speed of sound.

[Problems to be Solved by the Invention] By the way, it is possible to divide the entire flow path of fine particles with a pipe material or a casing, and -
If the fine particles are transported along this flow path together with the carrier gas by the differential pressure between the flow side and the downstream side, a very high transport speed cannot be expected. Furthermore, it is difficult to avoid contact between the particles and the walls of the casing and pipes that define the flow path of the particles throughout the entire transfer section.

For this reason, there is a problem in that, particularly when moving active fine particles to a collection position, the activity tends to disappear over time or due to contact with the tube material or the wall surface of the casing.

In addition, if the entire flow path of particles is divided by pipe material or housing,
Due to the generation of dead spaces in the flow, the collection rate of transported particles decreases, resulting in low f, making it unsuitable for transporting multi-stitched particles.

On the other hand, conventional f-line tubes and tapered nozzles produce a diffused flow in which the density distribution of fine particles in the jet flow is large. Therefore, when spraying fine particles onto a substrate, it is difficult to control uniform spraying. Furthermore, it is difficult to control the area for uniform spraying, and there is also the problem that it is difficult to spray over a wide area.

[Means for Solving the Problems] The measures taken to solve the problems in item L are explained with reference to FIG. 1, which is an explanatory diagram of the basic principle of the present invention. This is a particle flow control device equipped with a plurality of stripes that uniformize the flow of particles, and the above-mentioned problems are solved by making it possible to form a beam of each particle flow.

The contracting/expanding nozzle 1 in the present invention is a throat portion 2 whose opening area is gradually narrowed from the inlet 1a toward the middle portion, and whose opening area gradually increases from the throat portion 2 toward the outlet 1b. , refers to a nozzle that is enlarged. In FIG. 1, for convenience of explanation, the inlet and outlet sides of the contraction/expansion nozzle 1 are connected to a flow chamber 3 and a downstream chamber 4, respectively, which are closed systems. However, the inflow side and the outflow side of the contraction/expansion nozzle l in the present invention can be either a closed system or an open system as long as a pressure difference is generated between the two and the particles can flow together with the carrier gas. Good too. Further, in FIG. 1, three contracting/expanding nozzles l are provided, but the number of contracting/expanding nozzles l may be two or four or more.

[Created by].

For example, as shown in FIG.
When the inside is evacuated by the vacuum pump 5, the upstream chamber 3 and the downstream chamber 41
A pressure difference is created at 111. Therefore, the supplied carrier gas containing fine particles is transferred from the upstream chamber 3 to each contraction/expansion nozzle 1.
, and flows into the downstream chamber 4.

By the way, each contraction/expansion nozzle l functions not only to eject fine particles together with carrier gas according to the pressure difference between the upstream side and the downstream side, but also to equalize the flow of the ejected carrier gas and fine particles. be. Therefore, if the particles are sprayed onto the substrate 6 by the uniform flow of the plurality of particles, the particles can be uniformly sprayed over a wide range on the substrate 6.

In addition, each contraction/expansion nozzle l adjusts the pressure ratio in the upstream chamber 3 and the downstream chamber 4, and the ratio A/a between the opening area a of the throat portion 2 and the opening area A of the outflow port 1b. The flow of fine particles ejected together with carrier gas can be sped up. If the pressure ratio in the upstream chamber 3 and the downstream chamber 4 is less than the critical pressure ratio, the flow velocity at the outlet of the contraction/expansion nozzle l becomes a subsonic flow or less, and the particles are decelerated and ejected together with the carrier gas. Further, if the pressure ratio is equal to or higher than the critical pressure ratio, the outlet flow velocity of the contraction/expansion nozzle l becomes a supersonic flow, and the fine particles can be ejected together with the carrier gas at a super high speed.

] - In ejection where the pressure ratio is less than the critical pressure ratio, the ejected carrier gas and fine particles form a uniform diffusion flow, making it possible to uniformly spray the fine particles over a relatively wide area at once. Become.

On the other hand, when particles are ejected in a fixed direction along with carrier gas as an ultra-high-speed flow as described above, the carrier gas and particles travel straight while maintaining almost the jet cross section immediately after ejection.
Beamed. Therefore, each flow of fine particles carried by this carrier gas is also converted into a beam, which travels through the space in the downstream chamber 4 with minimal diffusion, in a spatially independent state without interference with the wall surface of the downstream chamber 4, and It will be transported at super high speed.

For this reason, for example, it is possible to form active fine particles in the flow chamber 3 and transfer them directly into a beam by each contraction/expansion nozzle l, or to Forming active microparticles immediately after l,
If this beam is transferred as it is, it can be transferred as multiple beams at supersonic speed and in a spatially stable state. can be collected. Therefore, it is possible to collect fine particles of many mice in a good active state. In addition, since the fine particles are sprayed onto the substrate 6 as multiple beams whose jet cross section is approximately constant in the flow direction, this spraying can easily cover a wide range including the irradiation area of the multiple beams. It is something that can be controlled.

[Example] Fig. 2 is a schematic diagram of an example in which the present invention is applied to a film forming apparatus using ultrafine particles.
4a is the first downstream chamber, and 4b is the RFI chamber.

] The second flow chamber 3 and the F-th flow chamber 4a are configured as an integrated unit, and the skimmer 7, gate valve 8, and first downstream chamber 4b, which are also each unitized, are all in the second downstream chamber 4a. They are sequentially connected to each other so that they can be connected and separated through flanges having a common diameter (hereinafter referred to as "common flanges"). ] - The flow chamber 3, the first downstream chamber 4a, and the second downstream chamber 4b are maintained at a high degree of vacuum in stages from the upstream chamber 3 to the second downstream chamber 4b by an exhaust system described below. be.

A gas phase excitation device 9 is attached to one side of the I-flow chamber 3 via a common flange. This gas phase excitation device 9 generates active ultrafine particles by plasma, and sends the ultrafine particles together with a carrier gas such as hydrogen, helium, argon, nitrogen, etc. to three contracting and expanding nozzles l located on opposite sides. This is what I send out. To prevent the formed ultrafine particles from adhering to the inner surface of the upstream chamber 3,
The inner surface may be subjected to 1z treatment. Furthermore, since the first downstream chamber 4a has a higher degree of vacuum than the upstream chamber 3, the generated ultrafine particles directly flow through each contraction/expansion nozzle l along with the carrier gas due to the pressure difference between the two. Then, it flows to the first downstream chamber 4a.

As shown in FIG. 3(a), the gas phase excitation device 9 includes a rod-shaped first electrode 8a inside a tubular second electrode 8b, and supplies carrier gas and source gas into the first second electrode 8b. Thus, a discharge is caused between the two types 8i9a and 9b. In addition, as shown in FIG. 3(b), the gas phase excitation device 9 has a first electrode 9a provided in the first electrode 8b as a porous tube, and both electrodes are connected through the inside of the first electrode 8a. 9a, 9b
A carrier gas and a raw material gas may be supplied between the two.
As shown in (c), both half-tubular electrodes 9a,
9b are joined into a tubular shape via an insulating material 9c, and both electrodes 9a,
It is also possible to supply the carrier gas and the raw material gas into the tube formed in 8b.

Each contraction/expansion nozzle l is connected to the first/de flow chamber 4a]-flow chamber 3
At the side end of the side, an inflow 111a is opened 11 into the flow chamber 3,
It is attached via a common flange in a state where it projects into the flow chamber 3 by causing the flow to flow out into the first downstream chamber 4a [11b is opened 1'']. However, these contraction/expansion nozzles l are
It is also possible to attach them with a shape that protrudes into the flow chamber 4a, or to have a mixture of those that protrude into the flow chamber 3 and those that protrude into the flow chamber 4d. The direction in which each contraction/expansion nozzle 1 should protrude depends on the size and amount of the ultrafine particles to be transported.
It may be selected depending on the characteristics etc.

As mentioned above, the contraction/expansion nozzle 1 has an inlet port 1a.
It is sufficient if the opening area is gradually narrowed down to form the throat part 2, and then the opening area is gradually expanded again to form the outflow port 1b, which is shown enlarged in Fig. 4(a). As such, it is preferable that the inner circumferential surface in the vicinity of the outlet port lb is substantially parallel to the central axis. This is because the direction of flow of the carrier gas and ultrafine particles to be ejected is influenced to some extent by the direction of the inner circumferential surface near the outlet lb, so that it is possible to make the flow parallel to each other as easily as possible. However, the 41st
As shown in Figure (b), if the angle α of the inner circumferential surface from the throat portion 2 to the outlet 1b with respect to the central axis is set to 7° or less, preferably 5° or less, the peeling phenomenon is less likely to occur and the gushing is prevented. Since the flow of the carrier gas and the ultrafine particles is maintained substantially uniformly, it is not necessary to form the parallel portion in this case. By omitting the formation of the parallel portion, the contraction/expansion nozzle 1 can be manufactured easily. Furthermore, if the contraction/expansion nozzle l is made rectangular as shown in FIG. 4(C), carrier gas and ultrafine particles can be ejected in a slit shape.

Here, the separation phenomenon is a phenomenon in which when there is a protrusion etc. on the inner surface of the contraction/expansion nozzle l, the boundary layer between the inner surface of the contraction/expansion nozzle l and the flowing fluid becomes large and the flow becomes non-uniform. The faster the jet flow, the more likely it is to occur. In order to prevent this peeling phenomenon +L, the above-mentioned angle α is preferably made smaller as the inner surface finishing precision of the contraction/expansion nozzle l is inferior. The inner surface of the contraction/expansion nozzle 1 is JIS B 0.
801, three or more inverted triangular marks representing surface finish accuracy, and optimally four or more are preferred. In particular, the separation phenomenon at the enlarged part of the contraction/expansion nozzle l greatly affects the subsequent flow of carrier gas and ultrafine particles. The nozzle 1 can be easily manufactured. Furthermore, in order to prevent the occurrence of a peeling phenomenon, the throat portion 2 needs to have a smooth curved surface so that the differential coefficient in the rate of change in cross-sectional area does not become ■.

The material of the contraction/expansion nozzle l is, for example, iron.

In addition to stainless steel and other metals, acrylic resin,
A wide variety of materials can be used, including synthetic resins such as polyvinyl fluoride, polyethylene, polystyrene, and polypropylene, ceramic materials, quartz, and glass. This material may be selected in consideration of non-reactivity with the generated ultrafine particles, processability, gas release properties in a vacuum system, etc. Furthermore, the inner surface of the contraction/expansion nozzle l can be plated or coated with a material that is less likely to cause adhesion or reaction of ultrafine particles. Specific examples include polyfluoroethylene coating.

The length of the contraction/expansion nozzle l can be arbitrarily determined depending on the size of the apparatus, etc. By the way, when flowing through each contraction/expansion nozzle 1, the carrier gas and ultrafine particles are
The retained thermal energy is converted into kinetic energy.

Particularly when ejected at supersonic speed, the thermal energy becomes significantly small, resulting in a supercooled state. Therefore, if the carrier gas 13° contains condensed components, it is also possible to actively condense them by the supercooled state, thereby forming ultrafine particles.

The formation of ultrafine particles by this is homogeneous nucleation, so
Easy to obtain homogeneous ultrafine particles. Moreover, in this case, in order to perform sufficient condensation, it is preferable that each contraction/expansion nozzle l be long. On the other hand, when condensation occurs as described above, thermal energy increases and velocity energy decreases. Therefore, in order to maintain high-speed jetting, it is preferable that each contraction/expansion nozzle l be short.

By appropriately adjusting the relationship between the pressure ratio in the flow chamber 3 and the downstream chamber 4 and the ratio A/a between the opening area a of the throat section 2 and the opening area of the outlet 1b, each of the above-mentioned contracting and expanding nozzles 1 By flowing through the inside, the carrier gas containing the ultrafine particles is made into a beam and flows at an extremely high speed from the first downstream chamber 4a to the second downstream chamber 4b.

The skimmer 7 is installed in the first downstream chamber 4a so that the second downstream chamber 4b can maintain a sufficiently higher degree of vacuum than the first downstream chamber 4a.
This is to enable adjustment of the opening area between the first downstream chamber 4b and the second downstream chamber 4b. Specifically, as shown in FIG. 5, two adjusting plates 11 and 11' each having a letter-shaped notch 10 and 10' can be slid past each other with their notches 10 and 10' facing each other. It has been established in This adjustment plate 11° can be slid from the outside, and allows the passage of the beam and maintains a sufficient degree of vacuum in the second F flow chamber depending on the overlap between the two cutout portions 10 and 10'. It is adjusted to the degree of opening desired. In addition, skimmer 7
The shape of the notch 10.10' and the adjustment plate 11.11'' may be semicircular or other shapes other than the shape shown in the drawings.

The gate valve 8 has a weir-shaped valve body 13 that is raised and lowered by turning a handle 12, and is open when the beam is traveling. By closing this gate valve 8, the unit in the second downstream chamber 4b can be replaced while maintaining the degree of vacuum in the upstream chamber 3 and the first downstream chamber 4a. Further, in the apparatus of this embodiment, the ultrafine particles are collected in the second downstream chamber 4b, but if the gate valve 8 is a pole valve or the like, especially when the ultrafine particles are metal particles that are easily oxidized, By replacing the unit of the second downstream chamber 4b together with this Pall valve, there is an advantage that the unit can be replaced without the risk of rapid oxidation.

A base body 6 is located in the second downstream chamber 4b for receiving and depositing ultrafine particles transferred as a beam, and collecting the ultrafine particles in a film-formed state. This base body 6 is attached to the second f flow chamber 4b via a common flange, and is attached to the cylinder 1.
4 is attached to a base holder 16 at the tip of a slide shaft 15 that is slid by a slide shaft 15. A shutter 17 is located on the front side of the base 6, so that the beam can be blocked whenever necessary. Moreover, the substrate holder 16 is.

The substrate 6 can be heated or cooled under optimal temperature conditions for collecting ultrafine particles.

As shown in the figure, glass windows 18 are attached to the upper and lower sides of the upstream chamber 3 and the second downstream chamber 4b through common flanges, respectively, so that the inside can be observed.

In addition, although not shown, there is a first flow chamber 3 and a first downstream chamber 4.
Similar glass windows (similar to 18 in the figure) are attached to the front and rear of the a and second downstream chambers via common flanges. These glass windows 18 can be removed and replaced with various measuring devices, load lock chambers, etc. via a common flange.

Next, the exhaust system in this embodiment will be explained.

The upstream chamber 3 is connected to a main valve 20 via a pressure regulating valve 18.
connected to a. The first downstream chamber 4a is directly connected to a main valve 20a, and this main valve 20a is connected to a vacuum pump 5a. The second downstream chamber 4b is connected to a main valve 20b, which in turn is connected to a vacuum pump 5b. Furthermore, 2
1a and 21b are main valves 20a and 20b, respectively.
The auxiliary valve 23a is connected to the immediate upstream side of the auxiliary valve 22a and 22b.

This is a decompression pump connected to the vacuum pump 5a via 23b, and is used to check the inside of the upstream chamber 3, the first downstream chamber 4a, and the second downstream chamber 4b. In addition, 24a to 24h are
Each chamber 3, 4a, 4b and pump 5a, 5b, 2
1a and 21b are leak and purge valves.

First, the interference valves 21a and 21b and the pressure regulating valve 1
8, the JZ flow chamber 3, the first and second downstream chambers 4a,
4b is carried out using the vacuum pumps 20a and 2Qb. Next, the auxiliary valves 21a, 21b are closed, and the auxiliary valves 23a, 23b and the main valve 20a,
20b is opened, and the downstream chamber 3 is opened using the vacuum pumps 5a and 5b.
The insides of the first and second flow chambers 4a and 4b are made to have a sufficient degree of vacuum. At this time, by adjusting the opening degree of the pressure control valve 19, the degree of vacuum in the first downstream chamber 4a is made higher than that in the upstream chamber 3, and then the carrier gas and raw material gas are caused to flow, and then the first downstream chamber 4a is In order to increase the degree of vacuum in the first downstream chamber 4a,
Adjust with skimmer 7. This adjustment is performed using main valve 20.
This can also be done by adjusting the opening degree of b. The chambers 3, 4a, and 4b are controlled to maintain a constant degree of vacuum throughout the formation of ultrafine particles and the 1&film operation by beam injection. This control may be done manually, but each room has 3, 4
This may be done by detecting the pressure inside the valves a and 4b and automatically controlling the opening and closing of the pressure regulating valve 19, the main valves 20a and 20b, the skimmer 7, etc. based on the detected pressure.

The degree of vacuum may be controlled by separately providing vacuum pumps 5a for the upstream chamber 3 and the first and downstream chambers 4a for each chamber 3, 4a. However, as in this embodiment, if one vacuum pump 5a is used to evacuate in the direction of beam flow and the degree of vacuum in the upstream chamber 3 and the first downstream chamber 4a is controlled,
Even if there is some pulsation in the vacuum pump 5a, it is easy to keep the pressure difference between the two constant. Therefore, there is an advantage that it is easy to maintain a constant flow state that is susceptible to fluctuations in differential pressure.

The suction by the vacuum pumps 5a, 5b is especially
In the second downstream chambers 4a and 4b, it is preferable to carry out the treatment from above. By suctioning from above, it is possible to prevent the beam from falling due to gravity to some extent.

Although the apparatus according to this embodiment is as described above, the following modifications can be made.

First, the contraction/expansion nozzle l can be tilted vertically and horizontally, and can be scanned at regular intervals, and can also be configured to form a film over a wider range than 19 degrees. This tilting and scanning is especially advantageous when combined with the rectangular nozzle shown in FIG. 4(c).

The contraction/expansion nozzle l is formed of an insulator such as quartz, and microwaves are applied thereto to form active ultrafine particles inside the contraction/expansion nozzle l, or ultraviolet, infrared, or transparent material is formed of a translucent material. The flow can also be irradiated with light having various wavelengths, such as laser light. It is also possible to provide a plurality of contraction/expansion nozzles l to generate a plurality of beams at a time. The contraction/expansion nozzles l can be arranged not only in parallel to each other, but also at an angle so that the beam is concentrated in one place on the base 6. In addition, by connecting each enlargement/contraction nozzle l to an independent one-L flow chamber 3, beams of different particles can be run simultaneously, allowing stacking or mixed collection of different particles, It is also possible to form new particles through collisions between different particles by crossing them.

The base body 6 is held movably or rotatably in the vertical and horizontal directions,
It is also possible to receive the beam over a wider range. , 1 Furthermore, a long substrate 6 can be treated with fine particles by winding the substrate 6 into a roll μs and receiving the beam while sequentially sending out the substrate 6. Furthermore, 1 is Do? The treatment with fine particles may be performed while rotating the mu-shaped base 6.
・In this embodiment, it is composed of the generation chamber 3, the seventh lower flow chamber 4a, and the second downstream chamber 4b, but the second lower flow chamber 4b
or omit a further third downstream of the second downstream chamber.

Fourth...downstream chambers can also be connected. Also, above. By pressurizing the flow chamber 13, the i-th downstream chamber 4a can be made into an open system, and by reducing the pressure on the axis of the first downstream chamber, the flow chamber 3 can also be made into an open system. In particular, like an autoclave, the upstream chamber 3 is pressurized, and the first = downstream chamber 4a and beyond,
Depressurize the bottom. I can do it, , -・ □
・In this example, active ultrafine particles and particles are formed in the upstream chamber 3,
However, there is no need for this, and there is another one.
The fine particles formed during the process may be sent to the upstream chamber 3 together with the gas. Also, each reduction, expansion, etc.

2. It is also possible to obtain fine particles by providing a valve for opening and closing the large nozzle L, and by intermittently opening and closing the L valve while temporarily storing fine particles in the hm chamber 3 side. By opening and closing the valve in synchronization with the energy application performed on the downstream side including the throat portion 2 of the contraction/expansion nozzle 1, the load on the exhaust system can be significantly reduced, and the raw material gas can be used more effectively. It is possible to obtain a pulse-like particle flow at the same time. Furthermore, under the same exhaust conditions, L
The intermittent opening and closing described above has the advantage that it is easier to maintain a high vacuum on the downstream side. In the case of intermittent opening and closing, a chamber for temporarily storing fine particles may be provided between the upstream chamber 3 and the contraction/expansion nozzle l.

In addition, multiple contraction/expansion nozzles L are arranged in series in the flow direction, and the pressure/force ratio between the -L flow side and the downstream side is adjusted to maintain the beam speed and to maintain the beam speed in each chamber. Become spherical,
It is also possible to minimize the occurrence of dead space.

[Effects of the Invention] According to the present invention, fine particles can be transported as a plurality of supersonic beams in a uniformly dispersed state.
A large amount of fine particles can be transported at once with spatially independent IEs. Therefore, it is possible to reliably transport a large amount of active particles as they are to the collection position, and by controlling the irradiation surface of the beam, the spray can cover a wide area including the irradiation area of multiple beams. can be precisely controlled over the entire range. In addition, it becomes a focused ultra-high-speed parallel flow called a beam, and when it is made into a beam, thermal energy is converted to kinetic energy.
Since the particles in the beam are frozen, there are great expectations for the creation of new reaction fields using them. Furthermore, according to the flow control device of the present invention, since the fluid is in the frozen state, it is also possible to define the microscopic state of molecules in the fluid and handle the transition from one state to another state. In other words, it is possible to perform chemical reactions in the gas phase using a new method in which various energy levels of molecules are defined and energy corresponding to the levels is applied. In addition, by providing a field for energy exchange different from the conventional one, intermolecular compounds formed between relatively weak molecules such as hydrogen bonds and van der Waals bonds can be easily generated.

[Brief explanation of the drawing]

Figure 1 is an explanatory diagram of the basic principle of the present invention, Figure 2 is a schematic diagram showing an embodiment of the present invention applied to a film forming apparatus using ultrafine particles, and Figures 3 (a) to (C) are 4A to 4C are diagrams each showing an example of the shape of a contraction/expansion nozzle, and FIG. 5 is an explanatory diagram of a skimmer. 1: contraction/expansion nozzle, 1a: inlet, lb dual wave outlet 2: throat, 3: flow chamber, 4: downstream chamber,
4a: First downstream chamber, 4b: -Fth flow chamber, 5, 5a, 5b: Vacuum pump,
6: Substrate, 7: Skimmer, 8: Gate valve, 9: Gas phase excitation device, 9a: First electrode, 8b: First electrode, 10.10': Notch, +I, II
': Adjustment plate, 12: Handle, 13: Valve body, 14 Niji cylinder, 15 Ni slide shaft, 16 Two base holder, 17: Shutter, 18 Ni glass window, 18: Pressure adjustment valve, 20a, 20b: Main valve, 21a, 21b: Decompression pump, 22a, 22b: Arabiki valve, 23a, 23b: Auxiliary valve, 24a to 24h: Leak and purge valve.

Claims (1)

[Claims] 1) A flow control device for a particle flow, characterized in that a plurality of contraction/expansion nozzles are provided in a flow path.