JPS61223310A - Minute particle flow controller - Google Patents

Abstract

PURPOSE:To obtain the uniform flow of minute particles and permit the beam formation by determining the ratio of the opened port area of the throat part of a contraction and expansion nozzle and the opened port area of an effluence port according to the pressure ratio on the upstream side and the downstream side of the nozzle. CONSTITUTION:A contraction and expansion nozzle 1 in which the opened port area is gradually reduced from an inflow port 1a to form a throat part 2 and the opened port area is gradually increased from the throat part 2 towards an effluence port 1b is installed into a flow passage. Further, the ratio A/a between the opened port area (a) of the throat part 2 and the opened port area A of the effluence port 1b is set to a predetermined value according to the pressure ratio between in the upstream chamber 3 and the downstream chamber 4 of the contraction and expansion nozzle 1. With such constitution, the flow having a subsonic speed is formed when the pressure ratio is less than a critical pressure ratio, while, when the pressure ratio is over the critical pressure ratio, the flow having a supersonic speed can be obtained, and the flow of minute particles can be made uniform, and beam formation is permitted.

Description

Detailed Description of the Invention [Industrial Application Field] The present invention relates to a flow control device for a particulate flow that is used as a means for transporting or spraying particulates. It is expected to be applied to the formation of composite materials, doping processing, and new formation sites for fine particles.

In this specification, fine particles refer to atoms, molecules, ultrafine particles, and general fine particles. Here, ultrafine particles are, for example,
Evaporation method in gas, plasma evaporation method using gas phase reaction,
Obtained by gas phase chemical reaction method, colloidal precipitation method, solution spray pyrolysis method, etc. using liquid phase reaction,
Refers to ultrafine particles (generally 0.5 p, m or less).

General fine particles refer to fine particles obtained by general methods such as mechanical crushing and precipitation treatment. Also, a beam is a jet whose cross-sectional area is almost constant in the flow direction.
Its cross-sectional shape does not matter.

[Prior Art] Generally, fine particles are dispersed and suspended in a carrier gas and transported by the flow of the carrier gas.

Conventionally, the control of the flow of fine particles accompanying the transfer of fine particles has been carried out simply by dividing the entire flow path of the fine particles flowing together with the carrier gas with a pipe material or a casing based on the differential pressure between the upstream side and the downstream side. do not have. Therefore, although the flow of particles varies in strength and weakness, the flow of particles inevitably occurs in a dispersed state throughout the pipe material or casing that defines the flow path for particles.

Furthermore, when spraying fine particles onto a substrate, the fine particles are jetted out together with a carrier gas through a nozzle. The nozzle used to spray the fine particles is a simple parallel tube or a tapered nozzle, and the jet cross section of the fine particles immediately after being ejected is certainly narrowed down according to the area of the nozzle end face. However, since the jet is diffused at the exit surface of the nozzle, the flow path is merely temporarily constricted, and the speed of the jet does not exceed the speed of sound.

[Problem to be solved by the invention 1 By the way, if the entire flow path of fine particles is drawn in an X-shape by a tube material or a casing,
If the fine particles are transported along this flow path together with the carrier gas by the differential pressure between the upstream and downstream sides, a very high transport speed cannot be expected. Furthermore, it is difficult to avoid contact between the particles and the wall surface of the tube or casing that defines the flow path of the particles throughout the entire transfer section.

For this reason, there is a problem in that, particularly when moving active fine particles to a collection position, the activity tends to disappear over time or due to contact with the tube material or the wall surface of the casing.

In addition, if the entire flow path of particles is divided by pipe material or housing,
Due to the generation of dead space in the flow, the collection rate of the transported particles decreases, and the efficiency of using the carrier gas for transporting the particles also decreases.

On the other hand, in conventional parallel tubes and tapered nozzles, the jet stream that passes through it becomes a diffuse flow with a large density distribution of particles. Therefore, when spraying fine particles onto a substrate, it is difficult to control uniform spraying. Furthermore, uniform spraying makes it difficult to control the area.

[Means for Solving the Problems] The means taken to solve the above problems are explained with reference to FIG. 1, which is an explanatory diagram of the basic principle of the present invention. A flow control device for a particulate flow in which the ratio of the opening area of the throat part 2 of the nozzle 1 to the open area of the outflow lot tb is determined by the pressure ratio between the upstream side and the downstream side of the nozzle. The above problems have been solved by making the flow uniform and making it possible to form a beam.

The contraction/expansion nozzle l in the present invention is a throat part 2 in which the opening area is gradually narrowed from the opening la toward the middle part, and the opening area is gradually expanded from the throat part 2 toward the outlet 1b. refers to the nozzle that is In Figure 1,
For convenience of explanation, the inflow side and outflow side of the contraction/expansion nozzle 1 are as follows.
It is connected to an upstream chamber 3 and a downstream chamber 4, each of which is a closed system. However, the inflow side and the outflow side of the contraction/expansion nozzle l in the present invention can be an open system even if it is a closed system, as long as a pressure ratio is created between the two and the particles can flow together with the carrier gas. It's okay.

[Function] For example, as shown in FIG. 1, firstly, the gear 1 rear gas in which fine particles are dispersed and suspended is supplied into the upstream chamber 3, while the downstream chamber 4 is evacuated by the vacuum pump 5, and the upstream chamber 3 and Downstream chamber 4
Generates a pressure ratio between.

Therefore, the supplied carrier gas containing fine particles flows from the upstream chamber 3 through the contraction/expansion nozzle l and into the downstream chamber 4 due to the differential pressure.

By the way, the contraction/expansion nozzle l functions not only to eject fine particles together with the carrier gas according to the pressure difference between the upstream side and the downstream side, but also to equalize the flow of the ejected carrier gas and fine particles. Therefore, if the fine particles are sprayed onto the base 6 using this uniform flow of the fine particles, the fine particles can be uniformly sprayed onto the base 6.

In addition, the contraction/expansion nozzle 1 adjusts the ratio A/a between the opening area a of the throat portion 2 and the opening area A of the outflow port 1b according to the pressure ratio in the upstream chamber 3 and the downstream chamber 4. The flow of fine particles ejected together with carrier gas can be sped up. If the pressure ratio in the upstream chamber 3 and the downstream chamber 4 is less than the critical pressure ratio, the flow velocity at the outlet of the contraction/expansion nozzle l becomes a subsonic flow or less, and the particles are decelerated and ejected together with the carrier gas. Further, if the pressure ratio is equal to or higher than the critical pressure ratio, the outlet flow velocity of the contraction/expansion nozzle 1 becomes a supersonic flow, and the fine particles can be ejected together with the carrier gas at a super high speed.

In the above-mentioned ejection where the pressure ratio is less than the critical pressure ratio, the ejected carrier gas and fine particles form a uniform diffusion flow, making it possible to uniformly spray the fine particles over a relatively wide range at once.

On the other hand, when particles are ejected in a fixed direction along with carrier gas as an ultra-high-speed flow as described above, the carrier gas and particles travel straight while maintaining almost the jet cross section immediately after ejection.
Beamed. Therefore, the flow of particles carried by this carrier gas is also converted into a beam, which moves through the space within the downstream chamber 4 with minimal diffusion, in a spatially independent state without interference with the wall surface of the downstream chamber 4, and at an ultra-high speed. It will be transported by

For this reason, it is possible, for example, to form active particles in the upstream chamber 3 and transfer them directly into a beam through the contraction/expansion nozzle 1, or to activate them within the contraction/expansion nozzle 1 or immediately after the contraction/expansion nozzle l. By forming fine particles having a particle size and transferring them as a beam, it is possible to transfer them as a spatially independent beam at supersonic speed.
For example, it can be deposited and collected on a substrate 6 provided in the downstream chamber 4. Therefore, it becomes possible to collect fine particles in a good active state. Further, since the fine particles are sprayed onto the substrate 6'' in the form of a beam whose jet cross section is substantially constant in the flow direction, the area of this spraying can be easily controlled.

[Example] Fig. 2 is a schematic diagram of an example in which the present invention is applied to a film forming apparatus using ultrafine particles.
is an upstream chamber, 4a is a first downstream chamber, and 4b is a second downstream chamber.

The upstream chamber 3 and the first downstream chamber 4a are constructed as an integrated unit, and the first downstream chamber 4a includes a skimmer 7, a gate pulp 8, and a second downstream chamber 4, which are also unitized.
b are sequentially connected to each other so as to be connectable and separable via flanges having a common diameter (hereinafter referred to as "common flanges"). Upstream chamber 3, first downstream chamber 4a, and second downstream chamber 4
b is maintained at a high degree of vacuum in stages from the upstream chamber 3 to the second downstream chamber 4b by an exhaust system to be described later.

A gas phase excitation device 9 is attached to one side of the upstream chamber 3 via a common flange. This gas phase excitation device 9 generates active ultrafine particles using plasma, and sends out the ultrafine particles together with a carrier gas such as hydrogen, helium, argon, nitrogen, etc. to a contraction/expansion nozzle l located on the opposite side. It is. In order to prevent the formed ultrafine particles from adhering to the inner surface of the upstream chamber 3, an anti-adhesion treatment may be applied to the inner surface of the upstream chamber 3. In addition, the generated ultrafine particles are
Since the first downstream chamber 4a has a higher degree of vacuum than the upstream chamber 3, it directly flows through the contraction/expansion nozzle l together with the carrier gas and flows into the first downstream chamber 4a.

As shown in FIG. 3(a), the gas phase excitation device 9 includes a rod-shaped first electrode 9a disposed within a tubular second electrode 8b, and a carrier gas and a raw material gas supplied into the second electrode 8b. Thus, a discharge is caused between both electrodes 9a and lllb.

In addition, as shown in FIG. 3(b), the gas phase excitation device 9 has a first electrode 9a provided in the second electrode 8b as a porous tube, and both electrodes are connected through the inside of the first electrode 9a. 9a, 9
A carrier gas and a raw material gas may be supplied between the two electrodes 9a, 9a, and 9a, as shown in FIG.
9b are joined into a tubular shape via an insulating material 9c, and both electrodes 9a
, ! It is also possible to supply the carrier gas and the raw material gas into the tube formed by 3b.

The contraction/expansion nozzle l opens the inlet port 1a in the upstream chamber 3 at the side end of the first downstream chamber 4a on the upstream chamber 3 side, and the first downstream chamber 4
The outflow port 1b is opened at a, and the upstream chamber 3 is protruded into the upstream chamber 3, and is attached via a common flange. However, the contraction/expansion nozzle 1 may be installed in a state in which it projects into the first downstream chamber 4a. The direction in which the contraction/expansion nozzle 1 should be projected may be selected depending on the size, amount, properties, etc. of the ultrafine particles to be transferred.

As mentioned above, the contraction/expansion nozzle 1 has an inlet port 1a.
It is sufficient if the opening area is gradually narrowed down to form the throat part 2, and then the opening area is gradually expanded again to form the outflow port 1b, which is shown enlarged in Fig. 4(a). As such, it is preferable that the inner circumferential surface near the outlet lb is approximately parallel to the central axis. This means that the flow direction of the jetted carrier gas and ultrafine particles is to some extent This is to make parallel flow as easy as possible since it is affected by the direction of the surface. However, as shown in FIG. 4(b), if the angle α of the inner peripheral surface from the throat portion 2 to the outlet 1b with respect to the central axis is set to 7° or less, preferably 5° or less, a peeling phenomenon occurs. In this case, it is not necessary to form the above-mentioned parallel portion, since the flow of the ejected carrier gas and ultrafine particles is maintained almost uniformly. By omitting the formation of the parallel portion, the contraction/expansion nozzle 1 can be manufactured easily. Further, if the contraction/expansion nozzle 1 is made rectangular as shown in FIG. 4(C), the carrier gas and ultrafine particles can be ejected in a slit shape.

Here, the separation phenomenon is a phenomenon in which when there is a protrusion or the like on the inner surface of the contraction/expansion nozzle 1, the boundary layer between the inner surface of the contraction/expansion nozzle 1 and the flowing fluid becomes large and the flow becomes non-uniform. The faster the jet flow, the more likely it is to occur. In order to prevent this peeling phenomenon, it is preferable that the above-mentioned angle α is made smaller as the inner surface finish accuracy of the contraction/expansion nozzle l becomes lower. The inner surface of the contraction/expansion nozzle l conforms to JIS B 08.
01, three or more inverted triangular marks representing surface finishing accuracy, optimally four or more are preferred. especially,
Since the peeling phenomenon in the enlarged part of the contraction-expansion nozzle 1 greatly affects the subsequent flow of carrier gas and ultrafine particles, the above-mentioned finishing accuracy is determined with emphasis on this enlarged part, so that the production of the contraction-expansion nozzle 1 is improved. It's easy to do. In addition, in order to prevent the occurrence of peeling phenomenon, the throat portion 2 is made a smooth curved surface, and the differential coefficient of the cross-sectional area change rate is
It is necessary to make sure that this does not happen.

As the material for the contraction/expansion nozzle 1, a wide variety of materials can be used, such as iron, stainless steel, and other metals, as well as synthetic resins such as acrylic resin, polyvinyl chloride, polyethylene, polystyrene, and polypropylene, ceramic materials, quartz, and glass.

This material may be selected by taking into consideration non-reactivity with the generated superparticles, workability, gas release properties in a vacuum system, etc. Furthermore, the inner surface of the contraction/expansion nozzle 1 can be plated or coated with a material that is less likely to cause adhesion or reaction of ultrafine particles. Specific examples include polyfluoroethylene coating.

The length of the contraction/expansion nozzle l can be arbitrarily determined depending on the size of the apparatus and the like. By the way, contraction/expansion nozzle 1
When flowing through the carrier gas and ultrafine particles, the thermal energy they possess is converted into kinetic energy. Particularly when ejected at supersonic speed, the thermal energy becomes significantly small, resulting in a supercooled state. Therefore, if the carrier gas contains condensed components, it is also possible to actively condense them by the supercooled state, thereby forming ultrafine particles. Since the formation of ultrafine particles by this is uniform nucleation, it is easy to obtain homogeneous ultrafine particles.In addition, in this case, in order to achieve sufficient condensation, it is preferable that the contraction/expansion nozzle l is long.On the other hand, the above When such condensation occurs, thermal energy increases and velocity energy decreases. Therefore, in order to maintain high-speed jetting, it is preferable that the contraction/expansion nozzle 1 be short.
.

stomach.

According to the pressure ratio in the upstream chamber 3 and the downstream chamber 4, the ratio A/a between the opening area a of the throat section 2 and the opening area of the outflow port 1b is adjusted as appropriate to allow the flow to flow through the contraction/expansion nozzle l. By doing so, the carrier gas containing ultrafine particles is made into a beam and flows at high speed from the first downstream chamber 4a to the second downstream chamber 4b. □The skimmer 7 is designed to adjust the opening area between the first downstream chamber 4a and the second downstream chamber 4b so that the second downstream chamber 4b can maintain a sufficiently higher degree of vacuum than the first downstream chamber 4a. It is for the purpose of Specifically, as shown in FIG.
Two adjusting plates 11.11'' having a diameter of 0.10'' are provided so that they can be slid past each other with their notches 1G and 10' facing each other. This adjusting plate 11° 11' can be slid from the outside, and both cut-off parts 10,
The overlapping degree of 10' is adjusted to an opening degree that allows the passage of the beam and maintains a sufficient degree of vacuum in the second downstream chamber. Note that the shape of the notch 10.10' of the skimmer 7 and the adjustment plate 11.11' may be semicircular or other shapes other than the shape shown in the drawing.

The gate valve 8 has a weir-shaped valve body 13 that is raised and lowered by turning a handle 12, and is open when the beam is traveling. By closing this gate valve 8, the unit in the second downstream chamber 4b can be replaced while maintaining the degree of vacuum in the upstream chamber 3 and the first downstream chamber 4a. Further, in the apparatus of this embodiment, the ultrafine particles are collected in the second downstream chamber 4b, but if the gate valve 8 is a ball valve or the like, especially when the ultrafine particles are metal particles that are easily oxidized, By replacing the unit of the second downstream chamber 4b together with this Pall valve, there is an advantage that the unit can be replaced without the risk of rapid oxidation.

A base body 6 is located in the second downstream chamber 4b for receiving and depositing ultrafine particles transferred as a beam, and collecting the ultrafine particles in a film-formed state. This base body 6 is attached to the second downstream chamber 4b via a common flange, and is attached to the cylinder 1.
4 is attached to a base holder 16 at the tip of a slide shaft 15 that is slid by a slide shaft 15. A shutter 17 is located on the front side of the base 6, so that the beam can be blocked whenever necessary. Further, the substrate holder 1B is configured to heat or cool the substrate 6 under optimal temperature conditions for collecting ultrafine particles.

Incidentally, glass windows are attached to the upper and lower sides of the upstream chamber 3 and the second downstream chamber 4b through common flanges, respectively, as shown in the figure, so that the interior can be observed. Although not shown, the upstream chamber 3 and the first downstream chamber 4a
Similar glass windows (similar to 18 in the figure) are also installed at the front and rear of the second downstream chamber via common flanges. These glass windows 18 can be removed and replaced with various measuring devices, load lock chambers, etc. via a common flange.

Next, the exhaust system in this embodiment will be explained.

The upstream chamber 3 is connected to a main valve 20 via a pressure regulating valve 19.
connected to a. The first downstream chamber 4a is directly connected to a main valve 20a, and this main valve 20a is connected to a vacuum pump 5a. The second downstream chamber 4b is connected to a main valve 20b, which in turn is connected to a vacuum pump 5b. Furthermore, 2
1a and 21b are main valves 20a and 20b, respectively.
The auxiliary valve 23a is connected to the immediate upstream side of the auxiliary valve 22a and 22b.

The vacuum pump 23b is connected to the vacuum pump 5a and is used to check the inside of the upstream chamber 3, the first downstream chamber 4a, and the second downstream chamber 4b. In addition, 24a-24h are each chamber 3, 4a, 4b and pump 5a, 5b, 21
a, 21b are leak and purge valves.

First, the interference valves 21a and 21b and the pressure regulating valve 1
B is opened, and the upstream chamber 3, the first and second downstream chambers 4a, 4
The check in b is performed using the vacuum pumps 20a and 20b.

Next, the auxiliary valves 23a, 23b and the main valves 20a, 2 are closed.
0b is opened and the vacuum pumps 5a and 5b are used to create a sufficient degree of vacuum in the upstream chamber 3 and the first and second downstream chambers 4a and 4b. At this time, by adjusting the opening degree of the pressure regulating valve 19, the degree of vacuum in the first downstream chamber 4a is made higher than that in the upstream chamber 3,
Next, the carrier gas and the raw material gas are flowed, and the skimmer 7 is used to adjust the degree of vacuum in the second downstream chamber 4b to be higher than that in the first downstream chamber 4a. This adjustment can also be performed by adjusting the opening degree of the main valve 20b. The chambers 3, 4a, and 4b are controlled to maintain a constant degree of vacuum throughout the formation of ultrafine particles and the film forming operation by beam injection. This control may be done manually, but each room 3, 4a,
Alternatively, the pressure inside the pump 4b may be detected and the pressure regulating valve 19, main valves 20a, 20b, skimmer 7, etc. may be automatically opened/closed based on the detected pressure.

The degree of vacuum may be controlled by separately providing vacuum pumps 5a for the upstream chamber 3 and the first downstream chamber 4a for each chamber 3 and 4a. However, as in this embodiment, one vacuum pump 5a is used to exhaust the beam in the flow direction,
By controlling the degree of vacuum in the upstream chamber 3 and the first downstream chamber 4a, it is easy to keep the pressure ratio between them constant even if there is some pulsation in the vacuum pump 5a. Therefore, there is an advantage that it is easy to maintain a constant flow state that is susceptible to fluctuations in the pressure ratio.

The suction by the vacuum pumps 5a, 5b is preferably performed from above, particularly in the first and second downstream chambers 4a, 4b. By suctioning from above, it is possible to prevent the beam from falling due to gravity to some extent.

- Although the apparatus according to this embodiment is as described above, the following modifications are possible.

First, the contraction/expansion nozzle l can be tilted vertically and horizontally, and can be scanned at regular intervals, so that film formation can be performed over a wide range. Particularly, this tilting and scanning is advantageous when combined with the rectangular nozzle shown in FIG. 4(C).

The contraction/expansion nozzle 1 is made of an insulator such as quartz, and microwaves are applied thereto to form active ultrafine particles inside the contraction/expansion nozzle 1, or ultraviolet, infrared, or laser is formed by forming the contraction/expansion nozzle 1 with a transparent material. It is also possible to irradiate the flow with light having various wavelengths, such as light. It is also possible to provide a plurality of contraction/expansion nozzles 1 to generate a plurality of beams at once. In particular, when a plurality of contraction/expansion nozzles l are provided, by connecting each to an independent upstream chamber 3, beams of different particles can be run at the same time. By crossing comrades. It is also possible to form new particles by collisions between different particles.

The base body 6 is held movably or rotatably in the vertical and horizontal directions,
It is also possible to receive the beam over a wide range. Further, by winding up the base body 6 into a roll and sending it out one after another so as to receive the beam, a long base body 6 can also be treated with fine particles. Furthermore, the treatment with fine particles may be performed while rotating the drum-shaped base 6.

In this embodiment, the generation chamber 31. It is composed of a first downstream chamber 4a and a second downstream chamber 4b, and a second downstream chamber 4b.
of.

Omit or a third further downstream of the second downstream chamber.

Fourth...it is also possible to connect downstream chambers.

Also, if the upstream chamber 3 is pressurized, the first downstream chamber 4a becomes an open system.

Alternatively, the upper flow chamber 3 can be made into an open system by reducing the pressure in the first downstream chamber 4a. l! Then, like an autoclave, pressurize the upstream chamber 3 and pressurize the downstream chamber 9.
It is also possible to reduce the pressure below 4a.

5 In this example, active ultra-fine particles are formed in the upstream chamber 3.

It doesn't necessarily have to be this way.

Separately formed fine particles are transferred to the upstream chamber 3, hexagon, and rear gas.

You may also send them together 5゜7, reduction/enlargement 9
A valve is provided to open and close the nozzle 1, and upstream voice 3. On the side, for a time.

It is also possible to obtain solid particles by opening and closing the valve intermittently while collecting the fine particles. The above-mentioned valve is synchronized with the energy application performed on the downstream side including the throat section 2 of the contraction/expansion nozzle 1! 13, the burden on the exhaust system is significantly reduced, and 1. it is possible to obtain a pulsed particulate flow while effectively utilizing the raw material gas. Note that, under the same exhaust conditions, the above-mentioned intermittent opening and closing has the advantage that it is easier to maintain a high vacuum on the downstream side. This is effective in the case of intermittent opening and closing, and has the advantage of saving exhaust energy on the downstream side. 1 In this case, between the upstream chamber 3 and the contraction/expansion nozzle 1,
``A chamber may be provided to temporarily store fine particles.

In addition, 1. Multiple contraction/expansion nozzles 1 are arranged in series, and the pressure ratio on the upstream side and downstream side is adjusted respectively to maintain the beam speed, and each chamber is made spherical to create a dead space. It is also possible to prevent the occurrence of this as much as possible.

[Effects of the Invention] According to the present invention, fine particles can be transported as a uniformly dispersed supersonic beam.

Microparticles can be transported spatially independently and at ultrahigh speeds. Therefore, the active fine particles can be reliably transported to the collection position in their original state, and 1. By controlling the irradiation surface of the beam, the spray area can be precisely controlled. During this process, thermal energy is converted to kinetic energy, and the particles in the beam become frozen, so there are great expectations for the creation of new reaction fields using these particles. Furthermore, according to the flow control device of the present invention, since the fluid is in the frozen state, it is also possible to define the microscopic state of molecules in the fluid and handle the transition from one state to another state. In other words, it is possible to perform chemical reactions in the gas phase using a new method in which various energy levels of molecules are defined and energy corresponding to the levels is imparted. Furthermore, by providing a field for energy transfer unlike the conventional one, intermolecular compounds formed between relatively weak molecules such as hydrogen bonds and van der Waals bonds can be easily generated.

[Brief explanation of drawings]

FIG. 1 is an explanatory diagram of the basic principle of the present invention, FIG. 2 is a schematic diagram showing an embodiment of the present invention applied to a film forming apparatus using ultrafine particles, and FIGS. 3(a) to (c) are 4A to 4C are diagrams each showing an example of the shape of a contraction/expansion nozzle, and FIG. 5 is an explanatory diagram of a skimmer. l: contraction/expansion nozzle, 1a: inlet, 1b two outlets, 2: throat, 3: upstream chamber, 4: downstream chamber,
4a: first downstream chamber, 4b: second downstream chamber, 5, 5a, 5b: vacuum pump,
6: Substrate, 7: Skimmer, 8: Gate valve, 9: Gas phase excitation device, 8a: First electrode, 9b = Second electrode, 10.10": Notch, 11, 11
': Adjustment plate, 12: Handle, 13: Valve body, 14 Niji cylinder, 15 Ni slide shaft, 16: Substrate holder, 17: Shutter, 18 Ni glass window, 19: Pressure regulating valve, 20a, 20b: Main valve, 21a, 21b: Decompression pump, 22a, 22b: Arabiki valve, 23a, 23b: Auxiliary valve, 24a to 24h: Leak and purge valve. Figure 2 Figure 3 Figure 4 (C) Figure 5

Claims (1)

[Claims] 1) A contraction/expansion nozzle is provided in the flow path, and the ratio between the throat opening area and the outlet opening area of the nozzle is determined by the pressure ratio between the upstream side and the downstream side of the nozzle. Flow control device for particulate flow.