JPS6240826U - - Google Patents
Info
- Publication number
- JPS6240826U JPS6240826U JP13263085U JP13263085U JPS6240826U JP S6240826 U JPS6240826 U JP S6240826U JP 13263085 U JP13263085 U JP 13263085U JP 13263085 U JP13263085 U JP 13263085U JP S6240826 U JPS6240826 U JP S6240826U
- Authority
- JP
- Japan
- Prior art keywords
- drying
- processing section
- main processing
- processing apparatus
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001035 drying Methods 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000004140 cleaning Methods 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13263085U JPS6240826U (enExample) | 1985-08-29 | 1985-08-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13263085U JPS6240826U (enExample) | 1985-08-29 | 1985-08-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6240826U true JPS6240826U (enExample) | 1987-03-11 |
Family
ID=31032197
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13263085U Pending JPS6240826U (enExample) | 1985-08-29 | 1985-08-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6240826U (enExample) |
-
1985
- 1985-08-29 JP JP13263085U patent/JPS6240826U/ja active Pending
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