JPS61190131U - - Google Patents
Info
- Publication number
- JPS61190131U JPS61190131U JP1985073566U JP7356685U JPS61190131U JP S61190131 U JPS61190131 U JP S61190131U JP 1985073566 U JP1985073566 U JP 1985073566U JP 7356685 U JP7356685 U JP 7356685U JP S61190131 U JPS61190131 U JP S61190131U
- Authority
- JP
- Japan
- Prior art keywords
- motor
- semiconductor wafer
- temperature
- coating apparatus
- resist coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985073566U JPH0121558Y2 (enExample) | 1985-05-20 | 1985-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985073566U JPH0121558Y2 (enExample) | 1985-05-20 | 1985-05-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61190131U true JPS61190131U (enExample) | 1986-11-27 |
| JPH0121558Y2 JPH0121558Y2 (enExample) | 1989-06-27 |
Family
ID=30613058
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985073566U Expired JPH0121558Y2 (enExample) | 1985-05-20 | 1985-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0121558Y2 (enExample) |
-
1985
- 1985-05-20 JP JP1985073566U patent/JPH0121558Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0121558Y2 (enExample) | 1989-06-27 |