JPS6210437U - - Google Patents
Info
- Publication number
- JPS6210437U JPS6210437U JP10166285U JP10166285U JPS6210437U JP S6210437 U JPS6210437 U JP S6210437U JP 10166285 U JP10166285 U JP 10166285U JP 10166285 U JP10166285 U JP 10166285U JP S6210437 U JPS6210437 U JP S6210437U
- Authority
- JP
- Japan
- Prior art keywords
- motor
- coating device
- utility
- wafer chuck
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000006073 displacement reaction Methods 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10166285U JPS6210437U (enExample) | 1985-07-05 | 1985-07-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10166285U JPS6210437U (enExample) | 1985-07-05 | 1985-07-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6210437U true JPS6210437U (enExample) | 1987-01-22 |
Family
ID=30972593
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10166285U Pending JPS6210437U (enExample) | 1985-07-05 | 1985-07-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6210437U (enExample) |
-
1985
- 1985-07-05 JP JP10166285U patent/JPS6210437U/ja active Pending
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