JPS6240816B2 - - Google Patents

Info

Publication number
JPS6240816B2
JPS6240816B2 JP55102502A JP10250280A JPS6240816B2 JP S6240816 B2 JPS6240816 B2 JP S6240816B2 JP 55102502 A JP55102502 A JP 55102502A JP 10250280 A JP10250280 A JP 10250280A JP S6240816 B2 JPS6240816 B2 JP S6240816B2
Authority
JP
Japan
Prior art keywords
filament
heating power
emission current
filament heating
value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55102502A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5727549A (en
Inventor
Hiroyoshi Mori
Osamu Yamada
Hisahiro Furuya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10250280A priority Critical patent/JPS5727549A/ja
Publication of JPS5727549A publication Critical patent/JPS5727549A/ja
Publication of JPS6240816B2 publication Critical patent/JPS6240816B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP10250280A 1980-07-28 1980-07-28 Filament heating controller Granted JPS5727549A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10250280A JPS5727549A (en) 1980-07-28 1980-07-28 Filament heating controller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10250280A JPS5727549A (en) 1980-07-28 1980-07-28 Filament heating controller

Publications (2)

Publication Number Publication Date
JPS5727549A JPS5727549A (en) 1982-02-13
JPS6240816B2 true JPS6240816B2 (enExample) 1987-08-31

Family

ID=14329175

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10250280A Granted JPS5727549A (en) 1980-07-28 1980-07-28 Filament heating controller

Country Status (1)

Country Link
JP (1) JPS5727549A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4594554A (en) * 1983-06-30 1986-06-10 International Business Machines Corporation Programmed control of electron beam power
JPH03171542A (ja) * 1989-11-28 1991-07-25 Apuko:Kk 電子線発生装置
JP6943932B2 (ja) * 2019-09-10 2021-10-06 日本電子株式会社 電子顕微鏡の制御方法および電子顕微鏡
WO2026121073A1 (ja) * 2024-12-02 2026-06-11 デンカ株式会社 エミッタおよび電子銃

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5819809U (ja) * 1981-08-01 1983-02-07 本田技研工業株式会社 車両用接着式ウインド装置

Also Published As

Publication number Publication date
JPS5727549A (en) 1982-02-13

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