JPS5727549A - Filament heating controller - Google Patents

Filament heating controller

Info

Publication number
JPS5727549A
JPS5727549A JP10250280A JP10250280A JPS5727549A JP S5727549 A JPS5727549 A JP S5727549A JP 10250280 A JP10250280 A JP 10250280A JP 10250280 A JP10250280 A JP 10250280A JP S5727549 A JPS5727549 A JP S5727549A
Authority
JP
Japan
Prior art keywords
heating power
filament
dmax
emission current
filament heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10250280A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6240816B2 (enExample
Inventor
Hiroyoshi Mori
Osamu Yamada
Hisahiro Furuya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10250280A priority Critical patent/JPS5727549A/ja
Publication of JPS5727549A publication Critical patent/JPS5727549A/ja
Publication of JPS6240816B2 publication Critical patent/JPS6240816B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP10250280A 1980-07-28 1980-07-28 Filament heating controller Granted JPS5727549A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10250280A JPS5727549A (en) 1980-07-28 1980-07-28 Filament heating controller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10250280A JPS5727549A (en) 1980-07-28 1980-07-28 Filament heating controller

Publications (2)

Publication Number Publication Date
JPS5727549A true JPS5727549A (en) 1982-02-13
JPS6240816B2 JPS6240816B2 (enExample) 1987-08-31

Family

ID=14329175

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10250280A Granted JPS5727549A (en) 1980-07-28 1980-07-28 Filament heating controller

Country Status (1)

Country Link
JP (1) JPS5727549A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6014738A (ja) * 1983-06-30 1985-01-25 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション フイラメント電力制御方式
JPH03171542A (ja) * 1989-11-28 1991-07-25 Apuko:Kk 電子線発生装置
EP3792953A1 (en) * 2019-09-10 2021-03-17 Jeol Ltd. Control method for electron microscope and electron microscope
WO2026121073A1 (ja) * 2024-12-02 2026-06-11 デンカ株式会社 エミッタおよび電子銃

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5819809U (ja) * 1981-08-01 1983-02-07 本田技研工業株式会社 車両用接着式ウインド装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5819809U (ja) * 1981-08-01 1983-02-07 本田技研工業株式会社 車両用接着式ウインド装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6014738A (ja) * 1983-06-30 1985-01-25 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション フイラメント電力制御方式
JPH03171542A (ja) * 1989-11-28 1991-07-25 Apuko:Kk 電子線発生装置
EP3792953A1 (en) * 2019-09-10 2021-03-17 Jeol Ltd. Control method for electron microscope and electron microscope
WO2026121073A1 (ja) * 2024-12-02 2026-06-11 デンカ株式会社 エミッタおよび電子銃

Also Published As

Publication number Publication date
JPS6240816B2 (enExample) 1987-08-31

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