JPS6240292U - - Google Patents

Info

Publication number
JPS6240292U
JPS6240292U JP13235385U JP13235385U JPS6240292U JP S6240292 U JPS6240292 U JP S6240292U JP 13235385 U JP13235385 U JP 13235385U JP 13235385 U JP13235385 U JP 13235385U JP S6240292 U JPS6240292 U JP S6240292U
Authority
JP
Japan
Prior art keywords
bearings
repel
turbo
molecular pump
permanent magnets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13235385U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13235385U priority Critical patent/JPS6240292U/ja
Publication of JPS6240292U publication Critical patent/JPS6240292U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)

Description

【図面の簡単な説明】
第１図は本考案の実施例を示す要部説明図、第
２図は従来のターボ分子ポンプを示す要部説明図
である。 ７……ロータ軸、８，９……永久磁石、１０…
…ステータ、１１……下部軸受。

Claims (1)

    【実用新案登録請求の範囲】
  1. 上部軸受は、同心状に配置された静止側及び回
    転側の２つのリング状永久磁石で構成され、互い
    に向かい合う空隙間で互いに反撥するよう着磁さ
    れた反撥構造を有し、下部軸受は軸方向に負荷能
    力のあるすべり軸受を用い、これらの軸受が低真
    空側に設けられたことを特徴とするターボ分子ポ
    ンプ。
JP13235385U 1985-08-29 1985-08-29 Pending JPS6240292U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13235385U JPS6240292U (ja) 1985-08-29 1985-08-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13235385U JPS6240292U (ja) 1985-08-29 1985-08-29

Publications (1)

Publication Number Publication Date
JPS6240292U true JPS6240292U (ja) 1987-03-10

Family

ID=31031658

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13235385U Pending JPS6240292U (ja) 1985-08-29 1985-08-29

Country Status (1)

Country Link
JP (1) JPS6240292U (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50158741A (ja) * 1974-06-14 1975-12-22
JPS5879695A (ja) * 1981-11-06 1983-05-13 Seiko Instr & Electronics Ltd 磁気軸受を応用した軸流分子ポンプ
JPS60135694A (ja) * 1983-12-23 1985-07-19 Hitachi Ltd タ−ボ分子ポンプ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50158741A (ja) * 1974-06-14 1975-12-22
JPS5879695A (ja) * 1981-11-06 1983-05-13 Seiko Instr & Electronics Ltd 磁気軸受を応用した軸流分子ポンプ
JPS60135694A (ja) * 1983-12-23 1985-07-19 Hitachi Ltd タ−ボ分子ポンプ

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