JPS6140510U - 磁気軸受装置 - Google Patents

磁気軸受装置

Info

Publication number
JPS6140510U
JPS6140510U JP1984124910U JP12491084U JPS6140510U JP S6140510 U JPS6140510 U JP S6140510U JP 1984124910 U JP1984124910 U JP 1984124910U JP 12491084 U JP12491084 U JP 12491084U JP S6140510 U JPS6140510 U JP S6140510U
Authority
JP
Japan
Prior art keywords
magnetic bearing
bearing device
magnetic
rotor shaft
bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1984124910U
Other languages
English (en)
Other versions
JPH068339Y2 (ja
Inventor
智秋 浦野
Original Assignee
セイコー精機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by セイコー精機株式会社 filed Critical セイコー精機株式会社
Priority to JP1984124910U priority Critical patent/JPH068339Y2/ja
Publication of JPS6140510U publication Critical patent/JPS6140510U/ja
Application granted granted Critical
Publication of JPH068339Y2 publication Critical patent/JPH068339Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00—Bearings with rolling contact, for exclusively rotary movement
    • F16C19/02—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
    • F16C19/14—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for both radial and axial load
    • F16C19/16—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for both radial and axial load with a single row of balls
    • F16C19/163—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for both radial and axial load with a single row of balls with angular contact
    • F16C19/166—Four-point-contact ball bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0442—Active magnetic bearings with devices affected by abnormal, undesired or non-standard conditions such as shock-load, power outage, start-up or touchdown
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0474—Active magnetic bearings for rotary movement
    • F16C32/0485—Active magnetic bearings for rotary movement with active support of three degrees of freedom

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【図面の簡単な説明】
第１図および第２図は本考案による磁気軸受装置の一実
施例を示すもので、第１図は本案磁気軸受装置を分子ポ
ンプに適用した分子ポンプの縦断面図、第２図は磁気軸
受装置の保護用ベアリングを示す一部切欠斜視図、第３
図は従来の分子ポンプを示す縦断面図、第４図は従来の
磁気軸受装置の保護用ベアリングを示す一部切欠斜視図
である。 １・・・ロータハウジング、２・・・ロータ軸、３・・
・高周波モータ、４・・・電磁石、５・・・永久磁石、
６・・・電，磁石、７・・・笥ネクタ、８・・・電源部
、１１・・・径方向センサ、１２・・・軸方向センサ、
１３，１４・・・総玉ベアリング、１５・・・内輪、１
６・・・外輪、−１７・・・ボール。

Claims (1)

    【実用新案登録請求の範囲】
  1. ロータ軸の径方向および軸方向を磁気軸受で浮揚状態に
    軸受し、かつ磁気軸受の電源断時に、保護用ベアリング
    によりロータ軸を回転自在に受けるようにした磁気軸受
    装置において、前記保護用ベアリングガラジアル型総玉
    ベアリングで構成されていることを特徴とする磁気軸受
    装置。
JP1984124910U 1984-08-16 1984-08-16 磁気軸受装置 Expired - Lifetime JPH068339Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984124910U JPH068339Y2 (ja) 1984-08-16 1984-08-16 磁気軸受装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984124910U JPH068339Y2 (ja) 1984-08-16 1984-08-16 磁気軸受装置

Publications (2)

Publication Number Publication Date
JPS6140510U true JPS6140510U (ja) 1986-03-14
JPH068339Y2 JPH068339Y2 (ja) 1994-03-02

Family

ID=30683609

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984124910U Expired - Lifetime JPH068339Y2 (ja) 1984-08-16 1984-08-16 磁気軸受装置

Country Status (1)

Country Link
JP (1) JPH068339Y2 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63289320A (ja) * 1987-05-20 1988-11-25 Koyo Seiko Co Ltd 磁気軸受装置における保護用ラジアル玉軸受
JPH01174594U (ja) * 1988-05-27 1989-12-12
JPH0653198A (ja) * 1992-06-03 1994-02-25 Hitachi Ltd 洗浄剤、および、これを用いた半導体基板の洗浄方法
WO2023248266A1 (ja) * 2022-06-20 2023-12-28 株式会社ジェイテクト 複列深溝玉軸受及び磁気軸受装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
AIAA COMMUN SATELLITE SYST.CONF=1978 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63289320A (ja) * 1987-05-20 1988-11-25 Koyo Seiko Co Ltd 磁気軸受装置における保護用ラジアル玉軸受
JPH01174594U (ja) * 1988-05-27 1989-12-12
JPH0653198A (ja) * 1992-06-03 1994-02-25 Hitachi Ltd 洗浄剤、および、これを用いた半導体基板の洗浄方法
WO2023248266A1 (ja) * 2022-06-20 2023-12-28 株式会社ジェイテクト 複列深溝玉軸受及び磁気軸受装置

Also Published As

Publication number Publication date
JPH068339Y2 (ja) 1994-03-02

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