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Priority to JP1978129048UpriorityCriticalpatent/JPS6239039Y2/ja
Publication of JPS5546440UpublicationCriticalpatent/JPS5546440U/ja
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Publication of JPS6239039Y2publicationCriticalpatent/JPS6239039Y2/ja
Load port of a semiconductor manufacturing apparatus having integrated kinematic coupling pins and sensors, and method of loading wafers using the same