JPS6237924U - - Google Patents

Info

Publication number
JPS6237924U
JPS6237924U JP12963785U JP12963785U JPS6237924U JP S6237924 U JPS6237924 U JP S6237924U JP 12963785 U JP12963785 U JP 12963785U JP 12963785 U JP12963785 U JP 12963785U JP S6237924 U JPS6237924 U JP S6237924U
Authority
JP
Japan
Prior art keywords
processing apparatus
vacuum processing
light
reflecting mirror
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12963785U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0526737Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985129637U priority Critical patent/JPH0526737Y2/ja
Publication of JPS6237924U publication Critical patent/JPS6237924U/ja
Application granted granted Critical
Publication of JPH0526737Y2 publication Critical patent/JPH0526737Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Drying Of Semiconductors (AREA)
JP1985129637U 1985-08-26 1985-08-26 Expired - Lifetime JPH0526737Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985129637U JPH0526737Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-08-26 1985-08-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985129637U JPH0526737Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-08-26 1985-08-26

Publications (2)

Publication Number Publication Date
JPS6237924U true JPS6237924U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-03-06
JPH0526737Y2 JPH0526737Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-07-07

Family

ID=31026382

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985129637U Expired - Lifetime JPH0526737Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-08-26 1985-08-26

Country Status (1)

Country Link
JP (1) JPH0526737Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03166718A (ja) * 1989-11-27 1991-07-18 Mitsubishi Electric Corp 化学気相成長装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5353970U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1976-10-08 1978-05-09
JPS5878428A (ja) * 1981-11-04 1983-05-12 Toshiba Corp 反応性イオンエツチングソ装置
JPS58131628A (ja) * 1982-01-31 1983-08-05 松下電工株式会社 消弧装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5353970U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1976-10-08 1978-05-09
JPS5878428A (ja) * 1981-11-04 1983-05-12 Toshiba Corp 反応性イオンエツチングソ装置
JPS58131628A (ja) * 1982-01-31 1983-08-05 松下電工株式会社 消弧装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03166718A (ja) * 1989-11-27 1991-07-18 Mitsubishi Electric Corp 化学気相成長装置

Also Published As

Publication number Publication date
JPH0526737Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-07-07

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