JPS6237326Y2 - - Google Patents

Info

Publication number
JPS6237326Y2
JPS6237326Y2 JP1980158969U JP15896980U JPS6237326Y2 JP S6237326 Y2 JPS6237326 Y2 JP S6237326Y2 JP 1980158969 U JP1980158969 U JP 1980158969U JP 15896980 U JP15896980 U JP 15896980U JP S6237326 Y2 JPS6237326 Y2 JP S6237326Y2
Authority
JP
Japan
Prior art keywords
sample
objective lens
magnetic field
magnetic
pole piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980158969U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5782052U (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980158969U priority Critical patent/JPS6237326Y2/ja
Publication of JPS5782052U publication Critical patent/JPS5782052U/ja
Application granted granted Critical
Publication of JPS6237326Y2 publication Critical patent/JPS6237326Y2/ja
Expired legal-status Critical Current

Links

JP1980158969U 1980-11-06 1980-11-06 Expired JPS6237326Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980158969U JPS6237326Y2 (en, 2012) 1980-11-06 1980-11-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980158969U JPS6237326Y2 (en, 2012) 1980-11-06 1980-11-06

Publications (2)

Publication Number Publication Date
JPS5782052U JPS5782052U (en, 2012) 1982-05-20
JPS6237326Y2 true JPS6237326Y2 (en, 2012) 1987-09-24

Family

ID=29518009

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980158969U Expired JPS6237326Y2 (en, 2012) 1980-11-06 1980-11-06

Country Status (1)

Country Link
JP (1) JPS6237326Y2 (en, 2012)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4962306A (en) * 1989-12-04 1990-10-09 Intenational Business Machines Corporation Magnetically filtered low loss scanning electron microscopy
JP5875500B2 (ja) * 2012-10-31 2016-03-02 株式会社日立ハイテクノロジーズ 電子ビーム顕微装置
US20240203685A1 (en) * 2022-12-20 2024-06-20 Fei Company Pole piece incorporating optical cavity for improved phase-contrast in electron microscope imaging

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5124859U (en, 2012) * 1974-08-13 1976-02-24

Also Published As

Publication number Publication date
JPS5782052U (en, 2012) 1982-05-20

Similar Documents

Publication Publication Date Title
JP3786875B2 (ja) 帯電粒子ビームデバイスのための対物レンズ
JP2000200579A (ja) 走査形電子顕微鏡
US5008537A (en) Composite apparatus with secondary ion mass spectrometry instrument and scanning electron microscope
JPH05266855A (ja) 走査電子顕微鏡
JP2009259444A (ja) 高分解能でかつ高コントラストな観察が可能な電子線応用装置
WO2020220569A1 (en) Scanning electron microscope with composite detection system and specimen detection method
JP2001074437A (ja) 回路パターン検査装置及び回路パターン検査方法
JP2004253369A (ja) 荷電粒子線装置
US3717761A (en) Scanning electron microscope
US4633085A (en) Transmission-type electron microscope
US6815678B2 (en) Raster electron microscope
JPS6237326Y2 (en, 2012)
JP2003151484A (ja) 走査型荷電粒子ビーム装置
JPH0935679A (ja) 走査電子顕微鏡
JP2001148232A (ja) 走査形電子顕微鏡
EP0085323B1 (en) Electromagnetic lens polepiece structure
JPH07105888A (ja) 走査電子顕微鏡
JPH02284340A (ja) 可変焦点距離複合電磁レンズ
JP2005032588A (ja) 電子顕微鏡用磁界型対物レンズ
JP3351647B2 (ja) 走査電子顕微鏡
JPS6242443Y2 (en, 2012)
JP4146103B2 (ja) 電界放射型電子銃を備えた電子ビーム装置
JP2023051853A (ja) 元素マッピングのための方法およびシステム
JPH07169429A (ja) 走査透過電子顕微鏡
JP3261792B2 (ja) 走査電子顕微鏡