JPS6237055U - - Google Patents
Info
- Publication number
- JPS6237055U JPS6237055U JP12900585U JP12900585U JPS6237055U JP S6237055 U JPS6237055 U JP S6237055U JP 12900585 U JP12900585 U JP 12900585U JP 12900585 U JP12900585 U JP 12900585U JP S6237055 U JPS6237055 U JP S6237055U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- processing apparatus
- vacuum chamber
- plasma processing
- plasma discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12900585U JPS6237055U (id) | 1985-08-24 | 1985-08-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12900585U JPS6237055U (id) | 1985-08-24 | 1985-08-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6237055U true JPS6237055U (id) | 1987-03-05 |
Family
ID=31025190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12900585U Pending JPS6237055U (id) | 1985-08-24 | 1985-08-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6237055U (id) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016509526A (ja) * | 2012-11-08 | 2016-03-31 | ザウアー ウルトラソニック ゲーエムベーハーＳａｕｅｒ Ｕｌｔｒａｓｏｎｉｃ Ｇｍｂｈ | 工具、工作機械、機械加工方法 |
-
1985
- 1985-08-24 JP JP12900585U patent/JPS6237055U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016509526A (ja) * | 2012-11-08 | 2016-03-31 | ザウアー ウルトラソニック ゲーエムベーハーＳａｕｅｒ Ｕｌｔｒａｓｏｎｉｃ Ｇｍｂｈ | 工具、工作機械、機械加工方法 |