JPS6237056U - - Google Patents
Info
- Publication number
- JPS6237056U JPS6237056U JP12900685U JP12900685U JPS6237056U JP S6237056 U JPS6237056 U JP S6237056U JP 12900685 U JP12900685 U JP 12900685U JP 12900685 U JP12900685 U JP 12900685U JP S6237056 U JPS6237056 U JP S6237056U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- vacuum chamber
- processing apparatus
- plasma processing
- shower tubes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12900685U JPS6237056U (id) | 1985-08-24 | 1985-08-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12900685U JPS6237056U (id) | 1985-08-24 | 1985-08-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6237056U true JPS6237056U (id) | 1987-03-05 |
Family
ID=31025192
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12900685U Pending JPS6237056U (id) | 1985-08-24 | 1985-08-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6237056U (id) |
-
1985
- 1985-08-24 JP JP12900685U patent/JPS6237056U/ja active Pending