JPS6237054U - - Google Patents

Info

Publication number
JPS6237054U
JPS6237054U JP12900485U JP12900485U JPS6237054U JP S6237054 U JPS6237054 U JP S6237054U JP 12900485 U JP12900485 U JP 12900485U JP 12900485 U JP12900485 U JP 12900485U JP S6237054 U JPS6237054 U JP S6237054U
Authority
JP
Japan
Prior art keywords
plasma
vacuum chamber
processing apparatus
shower tube
molded article
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12900485U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0315531Y2 (id
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12900485U priority Critical patent/JPH0315531Y2/ja
Publication of JPS6237054U publication Critical patent/JPS6237054U/ja
Application granted granted Critical
Publication of JPH0315531Y2 publication Critical patent/JPH0315531Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP12900485U 1985-08-24 1985-08-24 Expired JPH0315531Y2 (id)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12900485U JPH0315531Y2 (id) 1985-08-24 1985-08-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12900485U JPH0315531Y2 (id) 1985-08-24 1985-08-24

Publications (2)

Publication Number Publication Date
JPS6237054U true JPS6237054U (id) 1987-03-05
JPH0315531Y2 JPH0315531Y2 (id) 1991-04-04

Family

ID=31025188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12900485U Expired JPH0315531Y2 (id) 1985-08-24 1985-08-24

Country Status (1)

Country Link
JP (1) JPH0315531Y2 (id)

Also Published As

Publication number Publication date
JPH0315531Y2 (id) 1991-04-04

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