JPH0267637U - - Google Patents
Info
- Publication number
- JPH0267637U JPH0267637U JP14662288U JP14662288U JPH0267637U JP H0267637 U JPH0267637 U JP H0267637U JP 14662288 U JP14662288 U JP 14662288U JP 14662288 U JP14662288 U JP 14662288U JP H0267637 U JPH0267637 U JP H0267637U
- Authority
- JP
- Japan
- Prior art keywords
- microwave
- waveguide
- tube
- sample
- treated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002184 metal Substances 0.000 claims 1
- 239000007769 metal material Substances 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14662288U JPH0617284Y2 (ja) | 1988-11-11 | 1988-11-11 | マイクロ波プラズマ処理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14662288U JPH0617284Y2 (ja) | 1988-11-11 | 1988-11-11 | マイクロ波プラズマ処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0267637U true JPH0267637U (id) | 1990-05-22 |
JPH0617284Y2 JPH0617284Y2 (ja) | 1994-05-02 |
Family
ID=31416283
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14662288U Expired - Lifetime JPH0617284Y2 (ja) | 1988-11-11 | 1988-11-11 | マイクロ波プラズマ処理装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0617284Y2 (id) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH076895A (ja) * | 1993-12-17 | 1995-01-10 | Hitachi Ltd | マイクロ波プラズマ処理装置 |
-
1988
- 1988-11-11 JP JP14662288U patent/JPH0617284Y2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH076895A (ja) * | 1993-12-17 | 1995-01-10 | Hitachi Ltd | マイクロ波プラズマ処理装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0617284Y2 (ja) | 1994-05-02 |