JPS6235653B2 - - Google Patents

Info

Publication number
JPS6235653B2
JPS6235653B2 JP57087885A JP8788582A JPS6235653B2 JP S6235653 B2 JPS6235653 B2 JP S6235653B2 JP 57087885 A JP57087885 A JP 57087885A JP 8788582 A JP8788582 A JP 8788582A JP S6235653 B2 JPS6235653 B2 JP S6235653B2
Authority
JP
Japan
Prior art keywords
light source
optical system
ellipsoidal mirror
optical axis
field lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57087885A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58205127A (ja
Inventor
Akira Anzai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Priority to JP57087885A priority Critical patent/JPS58205127A/ja
Publication of JPS58205127A publication Critical patent/JPS58205127A/ja
Publication of JPS6235653B2 publication Critical patent/JPS6235653B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Lenses (AREA)
  • Light Sources And Details Of Projection-Printing Devices (AREA)
JP57087885A 1982-05-26 1982-05-26 楕円面鏡を有する照明装置 Granted JPS58205127A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57087885A JPS58205127A (ja) 1982-05-26 1982-05-26 楕円面鏡を有する照明装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57087885A JPS58205127A (ja) 1982-05-26 1982-05-26 楕円面鏡を有する照明装置

Publications (2)

Publication Number Publication Date
JPS58205127A JPS58205127A (ja) 1983-11-30
JPS6235653B2 true JPS6235653B2 (enrdf_load_stackoverflow) 1987-08-03

Family

ID=13927322

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57087885A Granted JPS58205127A (ja) 1982-05-26 1982-05-26 楕円面鏡を有する照明装置

Country Status (1)

Country Link
JP (1) JPS58205127A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61105244A (ja) * 1984-10-27 1986-05-23 Nissan Shatai Co Ltd ヘツドランプの光軸調整方法及びその装置
JPH04368952A (ja) * 1991-06-17 1992-12-21 Sumitomo Metal Mining Co Ltd レジストの露光方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS568330B2 (enrdf_load_stackoverflow) * 1973-07-02 1981-02-23
JPS5269260U (enrdf_load_stackoverflow) * 1975-11-19 1977-05-23

Also Published As

Publication number Publication date
JPS58205127A (ja) 1983-11-30

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