JPS58205127A - 楕円面鏡を有する照明装置 - Google Patents

楕円面鏡を有する照明装置

Info

Publication number
JPS58205127A
JPS58205127A JP57087885A JP8788582A JPS58205127A JP S58205127 A JPS58205127 A JP S58205127A JP 57087885 A JP57087885 A JP 57087885A JP 8788582 A JP8788582 A JP 8788582A JP S58205127 A JPS58205127 A JP S58205127A
Authority
JP
Japan
Prior art keywords
light source
optical system
light
image
ellipsoidal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57087885A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6235653B2 (enrdf_load_stackoverflow
Inventor
Akira Anzai
安西　暁
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Priority to JP57087885A priority Critical patent/JPS58205127A/ja
Publication of JPS58205127A publication Critical patent/JPS58205127A/ja
Publication of JPS6235653B2 publication Critical patent/JPS6235653B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Lenses (AREA)
  • Light Sources And Details Of Projection-Printing Devices (AREA)
JP57087885A 1982-05-26 1982-05-26 楕円面鏡を有する照明装置 Granted JPS58205127A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57087885A JPS58205127A (ja) 1982-05-26 1982-05-26 楕円面鏡を有する照明装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57087885A JPS58205127A (ja) 1982-05-26 1982-05-26 楕円面鏡を有する照明装置

Publications (2)

Publication Number Publication Date
JPS58205127A true JPS58205127A (ja) 1983-11-30
JPS6235653B2 JPS6235653B2 (enrdf_load_stackoverflow) 1987-08-03

Family

ID=13927322

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57087885A Granted JPS58205127A (ja) 1982-05-26 1982-05-26 楕円面鏡を有する照明装置

Country Status (1)

Country Link
JP (1) JPS58205127A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61105244A (ja) * 1984-10-27 1986-05-23 Nissan Shatai Co Ltd ヘツドランプの光軸調整方法及びその装置
JPH04368952A (ja) * 1991-06-17 1992-12-21 Sumitomo Metal Mining Co Ltd レジストの露光方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5023837A (enrdf_load_stackoverflow) * 1973-07-02 1975-03-14
JPS5269260U (enrdf_load_stackoverflow) * 1975-11-19 1977-05-23

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5023837A (enrdf_load_stackoverflow) * 1973-07-02 1975-03-14
JPS5269260U (enrdf_load_stackoverflow) * 1975-11-19 1977-05-23

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61105244A (ja) * 1984-10-27 1986-05-23 Nissan Shatai Co Ltd ヘツドランプの光軸調整方法及びその装置
JPH04368952A (ja) * 1991-06-17 1992-12-21 Sumitomo Metal Mining Co Ltd レジストの露光方法

Also Published As

Publication number Publication date
JPS6235653B2 (enrdf_load_stackoverflow) 1987-08-03

Similar Documents

Publication Publication Date Title
JPS60232552A (ja) 照明光学系
US5222112A (en) X-ray pattern masking by a reflective reduction projection optical system
JP3102076B2 (ja) 照明装置及びそれを用いた投影露光装置
JPH07201730A (ja) レチクルマスキングシステムを有する光学系の照明手段
CA1240862A (en) Distortion correction for an overhead projector system
JPS58113706A (ja) 水平位置検出装置
JPS597359A (ja) 照明装置
JP2000021765A (ja) 照明装置及びそれを用いた投影露光装置
JPS5964830A (ja) 照明装置
JPS6315739B2 (enrdf_load_stackoverflow)
JPS58205127A (ja) 楕円面鏡を有する照明装置
JP2551002B2 (ja) 楕円面鏡を有する照明装置
US4660966A (en) Optical alignment apparatus
JPH04256944A (ja) 照明装置及び投影露光装置
US3726594A (en) Image positioning optical arrangement in projection printing system
JPS6246844B2 (enrdf_load_stackoverflow)
JPH0261131B2 (enrdf_load_stackoverflow)
JP2807936B2 (ja) 微細パタン投影露光装置
JPH04225359A (ja) 投影露光装置及び方法、並びに素子製造方法
JPS6339963Y2 (enrdf_load_stackoverflow)
JPH0333732A (ja) プロジェクター用光源装置
JPH07183189A (ja) 照明光学系
JPS62193008A (ja) 照明装置
JPS6044601B2 (ja) 位置合わせ方法
JPS61100930A (ja) 位置検出方法