JPS6234717B2 - - Google Patents
Info
- Publication number
- JPS6234717B2 JPS6234717B2 JP8817480A JP8817480A JPS6234717B2 JP S6234717 B2 JPS6234717 B2 JP S6234717B2 JP 8817480 A JP8817480 A JP 8817480A JP 8817480 A JP8817480 A JP 8817480A JP S6234717 B2 JPS6234717 B2 JP S6234717B2
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- single crystal
- crucible
- temperature distribution
- pulling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 62
- 238000009826 distribution Methods 0.000 claims description 20
- 239000013078 crystal Substances 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 229910052799 carbon Inorganic materials 0.000 description 5
- 239000007789 gas Substances 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000000155 melt Substances 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002775 capsule Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Resistance Heating (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8817480A JPS5711897A (en) | 1980-06-27 | 1980-06-27 | Method of pulling up single crystal and device therefor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8817480A JPS5711897A (en) | 1980-06-27 | 1980-06-27 | Method of pulling up single crystal and device therefor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5711897A JPS5711897A (en) | 1982-01-21 |
| JPS6234717B2 true JPS6234717B2 (enrdf_load_stackoverflow) | 1987-07-28 |
Family
ID=13935539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8817480A Granted JPS5711897A (en) | 1980-06-27 | 1980-06-27 | Method of pulling up single crystal and device therefor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5711897A (enrdf_load_stackoverflow) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59137399A (ja) * | 1983-01-28 | 1984-08-07 | Nippon Telegr & Teleph Corp <Ntt> | 低転位密度単結晶の育成方法及びその装置 |
| JPS6046993A (ja) * | 1983-08-23 | 1985-03-14 | Sumitomo Electric Ind Ltd | 単結晶引上装置 |
| JPS6046998A (ja) * | 1983-08-26 | 1985-03-14 | Sumitomo Electric Ind Ltd | 単結晶引上方法及びそのための装置 |
| JPS60221391A (ja) * | 1984-04-18 | 1985-11-06 | Toshiba Corp | 化合物半導体単結晶育成装置 |
| JPS6144794A (ja) * | 1984-08-08 | 1986-03-04 | Hitachi Ltd | 発熱体 |
| JPS6153187A (ja) * | 1984-08-24 | 1986-03-17 | Sony Corp | 単結晶成長装置 |
-
1980
- 1980-06-27 JP JP8817480A patent/JPS5711897A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5711897A (en) | 1982-01-21 |
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