JPS6234246Y2 - - Google Patents
Info
- Publication number
- JPS6234246Y2 JPS6234246Y2 JP17360480U JP17360480U JPS6234246Y2 JP S6234246 Y2 JPS6234246 Y2 JP S6234246Y2 JP 17360480 U JP17360480 U JP 17360480U JP 17360480 U JP17360480 U JP 17360480U JP S6234246 Y2 JPS6234246 Y2 JP S6234246Y2
- Authority
- JP
- Japan
- Prior art keywords
- scale
- light
- diffracted light
- spindle
- reader
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 12
- 230000001427 coherent effect Effects 0.000 claims description 5
- 230000000903 blocking effect Effects 0.000 claims description 4
- 239000011295 pitch Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- 230000008859 change Effects 0.000 description 4
- 230000010363 phase shift Effects 0.000 description 4
- 230000005684 electric field Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17360480U JPS6234246Y2 (de) | 1980-12-03 | 1980-12-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17360480U JPS6234246Y2 (de) | 1980-12-03 | 1980-12-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5797211U JPS5797211U (de) | 1982-06-15 |
| JPS6234246Y2 true JPS6234246Y2 (de) | 1987-09-01 |
Family
ID=29531806
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17360480U Expired JPS6234246Y2 (de) | 1980-12-03 | 1980-12-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6234246Y2 (de) |
-
1980
- 1980-12-03 JP JP17360480U patent/JPS6234246Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5797211U (de) | 1982-06-15 |
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