JPS6210641Y2 - - Google Patents

Info

Publication number
JPS6210641Y2
JPS6210641Y2 JP7366481U JP7366481U JPS6210641Y2 JP S6210641 Y2 JPS6210641 Y2 JP S6210641Y2 JP 7366481 U JP7366481 U JP 7366481U JP 7366481 U JP7366481 U JP 7366481U JP S6210641 Y2 JPS6210641 Y2 JP S6210641Y2
Authority
JP
Japan
Prior art keywords
light
scale
output
signals
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7366481U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57185918U (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7366481U priority Critical patent/JPS6210641Y2/ja
Publication of JPS57185918U publication Critical patent/JPS57185918U/ja
Application granted granted Critical
Publication of JPS6210641Y2 publication Critical patent/JPS6210641Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP7366481U 1981-05-21 1981-05-21 Expired JPS6210641Y2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7366481U JPS6210641Y2 (de) 1981-05-21 1981-05-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7366481U JPS6210641Y2 (de) 1981-05-21 1981-05-21

Publications (2)

Publication Number Publication Date
JPS57185918U JPS57185918U (de) 1982-11-25
JPS6210641Y2 true JPS6210641Y2 (de) 1987-03-13

Family

ID=29869437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7366481U Expired JPS6210641Y2 (de) 1981-05-21 1981-05-21

Country Status (1)

Country Link
JP (1) JPS6210641Y2 (de)

Also Published As

Publication number Publication date
JPS57185918U (de) 1982-11-25

Similar Documents

Publication Publication Date Title
US4912322A (en) Optical type displacement detecting device
JP3210111B2 (ja) 変位検出装置
US4970388A (en) Encoder with diffraction grating and multiply diffracted light
JP3066923B2 (ja) エンコーダ及びこれを有するシステム
JPH0131127B2 (de)
JPH05240613A (ja) 変位測定装置及び方法
JPH06194123A (ja) 変位検出装置
JPH03148015A (ja) 位置測定装置
JP3005131B2 (ja) 変位検出装置
JPS6210641Y2 (de)
JPS632323B2 (de)
JPH06174424A (ja) 測長または測角装置
JPH05256666A (ja) ロータリーエンコーダー
EP0486050B1 (de) Verfahren und Vorrichtung zum Messen von Verschiebungen
JPS6128923B2 (de)
JP2503561B2 (ja) レ―ザ―干渉式エンコ―ダ
JPH0599638A (ja) 測角装置
JPS628489Y2 (de)
JP3199549B2 (ja) エンコーダ装置
JPS6244332Y2 (de)
JPS6234246Y2 (de)
JPH0151926B2 (de)
JP2675317B2 (ja) 移動量測定方法及び移動量測定装置
JPS6234244Y2 (de)
JPS6122243Y2 (de)