JPS6210641Y2 - - Google Patents
Info
- Publication number
- JPS6210641Y2 JPS6210641Y2 JP7366481U JP7366481U JPS6210641Y2 JP S6210641 Y2 JPS6210641 Y2 JP S6210641Y2 JP 7366481 U JP7366481 U JP 7366481U JP 7366481 U JP7366481 U JP 7366481U JP S6210641 Y2 JPS6210641 Y2 JP S6210641Y2
- Authority
- JP
- Japan
- Prior art keywords
- light
- scale
- output
- signals
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 8
- 230000001427 coherent effect Effects 0.000 claims description 4
- 238000000034 method Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 5
- 230000010363 phase shift Effects 0.000 description 4
- 230000000903 blocking effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7366481U JPS6210641Y2 (de) | 1981-05-21 | 1981-05-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7366481U JPS6210641Y2 (de) | 1981-05-21 | 1981-05-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57185918U JPS57185918U (de) | 1982-11-25 |
JPS6210641Y2 true JPS6210641Y2 (de) | 1987-03-13 |
Family
ID=29869437
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7366481U Expired JPS6210641Y2 (de) | 1981-05-21 | 1981-05-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6210641Y2 (de) |
-
1981
- 1981-05-21 JP JP7366481U patent/JPS6210641Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS57185918U (de) | 1982-11-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4912322A (en) | Optical type displacement detecting device | |
JP3210111B2 (ja) | 変位検出装置 | |
US4970388A (en) | Encoder with diffraction grating and multiply diffracted light | |
JP3066923B2 (ja) | エンコーダ及びこれを有するシステム | |
JPH0131127B2 (de) | ||
JPH05240613A (ja) | 変位測定装置及び方法 | |
JPH06194123A (ja) | 変位検出装置 | |
JPH03148015A (ja) | 位置測定装置 | |
JP3005131B2 (ja) | 変位検出装置 | |
JPS6210641Y2 (de) | ||
JPS632323B2 (de) | ||
JPH06174424A (ja) | 測長または測角装置 | |
JPH05256666A (ja) | ロータリーエンコーダー | |
EP0486050B1 (de) | Verfahren und Vorrichtung zum Messen von Verschiebungen | |
JPS6128923B2 (de) | ||
JP2503561B2 (ja) | レ―ザ―干渉式エンコ―ダ | |
JPH0599638A (ja) | 測角装置 | |
JPS628489Y2 (de) | ||
JP3199549B2 (ja) | エンコーダ装置 | |
JPS6244332Y2 (de) | ||
JPS6234246Y2 (de) | ||
JPH0151926B2 (de) | ||
JP2675317B2 (ja) | 移動量測定方法及び移動量測定装置 | |
JPS6234244Y2 (de) | ||
JPS6122243Y2 (de) |