JPS6234242Y2 - - Google Patents

Info

Publication number
JPS6234242Y2
JPS6234242Y2 JP1980162877U JP16287780U JPS6234242Y2 JP S6234242 Y2 JPS6234242 Y2 JP S6234242Y2 JP 1980162877 U JP1980162877 U JP 1980162877U JP 16287780 U JP16287780 U JP 16287780U JP S6234242 Y2 JPS6234242 Y2 JP S6234242Y2
Authority
JP
Japan
Prior art keywords
light
scale
output
receives
diffracted light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980162877U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5784406U (enEXAMPLES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980162877U priority Critical patent/JPS6234242Y2/ja
Publication of JPS5784406U publication Critical patent/JPS5784406U/ja
Application granted granted Critical
Publication of JPS6234242Y2 publication Critical patent/JPS6234242Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP1980162877U 1980-11-14 1980-11-14 Expired JPS6234242Y2 (enEXAMPLES)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980162877U JPS6234242Y2 (enEXAMPLES) 1980-11-14 1980-11-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980162877U JPS6234242Y2 (enEXAMPLES) 1980-11-14 1980-11-14

Publications (2)

Publication Number Publication Date
JPS5784406U JPS5784406U (enEXAMPLES) 1982-05-25
JPS6234242Y2 true JPS6234242Y2 (enEXAMPLES) 1987-09-01

Family

ID=29521695

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980162877U Expired JPS6234242Y2 (enEXAMPLES) 1980-11-14 1980-11-14

Country Status (1)

Country Link
JP (1) JPS6234242Y2 (enEXAMPLES)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49134353A (enEXAMPLES) * 1973-04-26 1974-12-24
JPS5174659A (enEXAMPLES) * 1974-12-24 1976-06-28 Nippon Electric Co
JPS5941123B2 (ja) * 1975-09-03 1984-10-04 株式会社日立製作所 光学的位置検出装置

Also Published As

Publication number Publication date
JPS5784406U (enEXAMPLES) 1982-05-25

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