JPS6233319Y2 - - Google Patents
Info
- Publication number
- JPS6233319Y2 JPS6233319Y2 JP202983U JP202983U JPS6233319Y2 JP S6233319 Y2 JPS6233319 Y2 JP S6233319Y2 JP 202983 U JP202983 U JP 202983U JP 202983 U JP202983 U JP 202983U JP S6233319 Y2 JPS6233319 Y2 JP S6233319Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- chuck table
- recess
- vacuum chuck
- intake
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 5
- 239000002210 silicon-based material Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 description 28
- 238000005498 polishing Methods 0.000 description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP202983U JPS59109140U (ja) | 1983-01-11 | 1983-01-11 | ウエ−ハバキユ−ムチヤツクテ−ブル |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP202983U JPS59109140U (ja) | 1983-01-11 | 1983-01-11 | ウエ−ハバキユ−ムチヤツクテ−ブル |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59109140U JPS59109140U (ja) | 1984-07-23 |
| JPS6233319Y2 true JPS6233319Y2 (en:Method) | 1987-08-26 |
Family
ID=30133727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP202983U Granted JPS59109140U (ja) | 1983-01-11 | 1983-01-11 | ウエ−ハバキユ−ムチヤツクテ−ブル |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59109140U (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023110283A (ja) * | 2022-01-28 | 2023-08-09 | 株式会社ディスコ | チャックテーブル、研削装置、及びチャックテーブルの製造方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0137871Y2 (en:Method) * | 1984-09-26 | 1989-11-14 | ||
| JP6542863B2 (ja) * | 2017-11-22 | 2019-07-10 | ローム株式会社 | 吸引保持装置およびウエハ研磨装置 |
-
1983
- 1983-01-11 JP JP202983U patent/JPS59109140U/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023110283A (ja) * | 2022-01-28 | 2023-08-09 | 株式会社ディスコ | チャックテーブル、研削装置、及びチャックテーブルの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59109140U (ja) | 1984-07-23 |
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