JPS6230362B2 - - Google Patents

Info

Publication number
JPS6230362B2
JPS6230362B2 JP55086545A JP8654580A JPS6230362B2 JP S6230362 B2 JPS6230362 B2 JP S6230362B2 JP 55086545 A JP55086545 A JP 55086545A JP 8654580 A JP8654580 A JP 8654580A JP S6230362 B2 JPS6230362 B2 JP S6230362B2
Authority
JP
Japan
Prior art keywords
transparent
slit
light
slit plate
bodies
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55086545A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5713307A (en
Inventor
Katsuhide Tanoshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP8654580A priority Critical patent/JPS5713307A/ja
Publication of JPS5713307A publication Critical patent/JPS5713307A/ja
Publication of JPS6230362B2 publication Critical patent/JPS6230362B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Control Of Position Or Direction (AREA)
JP8654580A 1980-06-27 1980-06-27 Position detector Granted JPS5713307A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8654580A JPS5713307A (en) 1980-06-27 1980-06-27 Position detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8654580A JPS5713307A (en) 1980-06-27 1980-06-27 Position detector

Publications (2)

Publication Number Publication Date
JPS5713307A JPS5713307A (en) 1982-01-23
JPS6230362B2 true JPS6230362B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-07-02

Family

ID=13889971

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8654580A Granted JPS5713307A (en) 1980-06-27 1980-06-27 Position detector

Country Status (1)

Country Link
JP (1) JPS5713307A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4899048A (en) * 1987-04-27 1990-02-06 Printware, Inc. Focused optical beam encoder of position
DE102005013222B4 (de) * 2005-03-17 2015-12-31 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
NL2003638A (en) 2008-12-03 2010-06-07 Asml Netherlands Bv Lithographic apparatus and device manufacturing method.

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4952567U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-08-10 1974-05-09

Also Published As

Publication number Publication date
JPS5713307A (en) 1982-01-23

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