JPS6230268B2 - - Google Patents

Info

Publication number
JPS6230268B2
JPS6230268B2 JP56186260A JP18626081A JPS6230268B2 JP S6230268 B2 JPS6230268 B2 JP S6230268B2 JP 56186260 A JP56186260 A JP 56186260A JP 18626081 A JP18626081 A JP 18626081A JP S6230268 B2 JPS6230268 B2 JP S6230268B2
Authority
JP
Japan
Prior art keywords
aluminum
dry etching
fluorocarbon
film
treatment method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56186260A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5887276A (ja
Inventor
Kenji Mitsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP18626081A priority Critical patent/JPS5887276A/ja
Publication of JPS5887276A publication Critical patent/JPS5887276A/ja
Publication of JPS6230268B2 publication Critical patent/JPS6230268B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
JP18626081A 1981-11-19 1981-11-19 ドライエツチング後処理方法 Granted JPS5887276A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18626081A JPS5887276A (ja) 1981-11-19 1981-11-19 ドライエツチング後処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18626081A JPS5887276A (ja) 1981-11-19 1981-11-19 ドライエツチング後処理方法

Publications (2)

Publication Number Publication Date
JPS5887276A JPS5887276A (ja) 1983-05-25
JPS6230268B2 true JPS6230268B2 (enrdf_load_stackoverflow) 1987-07-01

Family

ID=16185159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18626081A Granted JPS5887276A (ja) 1981-11-19 1981-11-19 ドライエツチング後処理方法

Country Status (1)

Country Link
JP (1) JPS5887276A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3084910B2 (ja) * 1992-03-18 2000-09-04 ヤマハ株式会社 配線形成法
JP3129144B2 (ja) * 1995-04-21 2001-01-29 日本電気株式会社 アッシング方法
US6325861B1 (en) * 1998-09-18 2001-12-04 Applied Materials, Inc. Method for etching and cleaning a substrate

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54158343A (en) * 1978-06-05 1979-12-14 Hitachi Ltd Dry etching method for al and al alloy

Also Published As

Publication number Publication date
JPS5887276A (ja) 1983-05-25

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