JPS62299901A - 耐衝撃性の調整された光学素子 - Google Patents
耐衝撃性の調整された光学素子Info
- Publication number
- JPS62299901A JPS62299901A JP62152396A JP15239687A JPS62299901A JP S62299901 A JPS62299901 A JP S62299901A JP 62152396 A JP62152396 A JP 62152396A JP 15239687 A JP15239687 A JP 15239687A JP S62299901 A JPS62299901 A JP S62299901A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- optical element
- oxide
- group
- modulus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims description 172
- 230000035939 shock Effects 0.000 title description 3
- 239000000463 material Substances 0.000 claims description 257
- 239000010410 layer Substances 0.000 claims description 187
- 229910052984 zinc sulfide Inorganic materials 0.000 claims description 46
- 239000005083 Zinc sulfide Substances 0.000 claims description 38
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 claims description 38
- 238000000034 method Methods 0.000 claims description 32
- 230000006378 damage Effects 0.000 claims description 27
- 229910021385 hard carbon Inorganic materials 0.000 claims description 25
- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 claims description 24
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims description 24
- 239000000395 magnesium oxide Substances 0.000 claims description 22
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 22
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims description 22
- HYXGAEYDKFCVMU-UHFFFAOYSA-N scandium oxide Chemical compound O=[Sc]O[Sc]=O HYXGAEYDKFCVMU-UHFFFAOYSA-N 0.000 claims description 22
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 claims description 21
- 229910052732 germanium Inorganic materials 0.000 claims description 21
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 21
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 17
- 229910005540 GaP Inorganic materials 0.000 claims description 17
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 17
- 239000002131 composite material Substances 0.000 claims description 17
- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical compound [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 claims description 17
- 229910000661 Mercury cadmium telluride Inorganic materials 0.000 claims description 16
- MCMSPRNYOJJPIZ-UHFFFAOYSA-N cadmium;mercury;tellurium Chemical compound [Cd]=[Te]=[Hg] MCMSPRNYOJJPIZ-UHFFFAOYSA-N 0.000 claims description 16
- 239000000203 mixture Substances 0.000 claims description 13
- 230000032798 delamination Effects 0.000 claims description 12
- 229910003460 diamond Inorganic materials 0.000 claims description 11
- 239000010432 diamond Substances 0.000 claims description 11
- -1 sulfide anion Chemical class 0.000 claims description 10
- 229910052747 lanthanoid Inorganic materials 0.000 claims description 9
- 150000002602 lanthanoids Chemical class 0.000 claims description 9
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 7
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 7
- 238000002834 transmittance Methods 0.000 claims description 7
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 7
- 229910000420 cerium oxide Inorganic materials 0.000 claims description 6
- 150000002500 ions Chemical class 0.000 claims description 6
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 claims description 6
- 150000004763 sulfides Chemical class 0.000 claims description 6
- 239000008240 homogeneous mixture Substances 0.000 claims description 4
- 230000003014 reinforcing effect Effects 0.000 claims description 4
- 239000002344 surface layer Substances 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims 11
- 150000001768 cations Chemical class 0.000 claims 10
- 229910052761 rare earth metal Inorganic materials 0.000 claims 7
- 229910052684 Cerium Inorganic materials 0.000 claims 1
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 claims 1
- VCEXCCILEWFFBG-UHFFFAOYSA-N mercury telluride Chemical compound [Hg]=[Te] VCEXCCILEWFFBG-UHFFFAOYSA-N 0.000 claims 1
- 229910052706 scandium Inorganic materials 0.000 claims 1
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 claims 1
- 239000011247 coating layer Substances 0.000 description 46
- 238000000576 coating method Methods 0.000 description 40
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 35
- 239000011248 coating agent Substances 0.000 description 33
- 230000006835 compression Effects 0.000 description 16
- 238000007906 compression Methods 0.000 description 16
- 230000007547 defect Effects 0.000 description 11
- 230000006870 function Effects 0.000 description 11
- 238000012545 processing Methods 0.000 description 10
- 238000007796 conventional method Methods 0.000 description 9
- 230000003628 erosive effect Effects 0.000 description 9
- 238000001000 micrograph Methods 0.000 description 9
- 230000003667 anti-reflective effect Effects 0.000 description 7
- 238000003754 machining Methods 0.000 description 7
- 239000011241 protective layer Substances 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 5
- 238000003331 infrared imaging Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 239000002356 single layer Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 230000035515 penetration Effects 0.000 description 4
- 239000012780 transparent material Substances 0.000 description 4
- 239000011701 zinc Substances 0.000 description 4
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 3
- 230000001788 irregular Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 229910052717 sulfur Inorganic materials 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000005056 compaction Methods 0.000 description 2
- 230000001143 conditioned effect Effects 0.000 description 2
- 230000003750 conditioning effect Effects 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000003116 impacting effect Effects 0.000 description 2
- 238000011068 loading method Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 230000002787 reinforcement Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000002211 ultraviolet spectrum Methods 0.000 description 2
- 238000001429 visible spectrum Methods 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- ARWMTMANOCYRLU-UHFFFAOYSA-N [Ca].[La] Chemical compound [Ca].[La] ARWMTMANOCYRLU-UHFFFAOYSA-N 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- GBSZWDVPHSGHAX-UHFFFAOYSA-N calcium lanthanum(3+) sulfide Chemical compound [S-2].[La+3].[Ca+2] GBSZWDVPHSGHAX-UHFFFAOYSA-N 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- TXKMVPPZCYKFAC-UHFFFAOYSA-N disulfur monoxide Inorganic materials O=S=S TXKMVPPZCYKFAC-UHFFFAOYSA-N 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 125000001183 hydrocarbyl group Chemical group 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000002329 infrared spectrum Methods 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910000734 martensite Inorganic materials 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 238000001694 spray drying Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- XTQHKBHJIVJGKJ-UHFFFAOYSA-N sulfur monoxide Chemical compound S=O XTQHKBHJIVJGKJ-UHFFFAOYSA-N 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
- 238000005496 tempering Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/14—Protective coatings, e.g. hard coatings
-
- G02B1/105—
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Optical Elements Other Than Lenses (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US87589386A | 1986-06-18 | 1986-06-18 | |
| US875893 | 1986-06-18 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3267188A Division JPH0682164B2 (ja) | 1986-06-18 | 1991-09-18 | 耐衝撃性の調整された光学素子及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62299901A true JPS62299901A (ja) | 1987-12-26 |
| JPH0578001B2 JPH0578001B2 (enrdf_load_stackoverflow) | 1993-10-27 |
Family
ID=25366557
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62152396A Granted JPS62299901A (ja) | 1986-06-18 | 1987-06-18 | 耐衝撃性の調整された光学素子 |
| JP3267188A Expired - Lifetime JPH0682164B2 (ja) | 1986-06-18 | 1991-09-18 | 耐衝撃性の調整された光学素子及びその製造方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3267188A Expired - Lifetime JPH0682164B2 (ja) | 1986-06-18 | 1991-09-18 | 耐衝撃性の調整された光学素子及びその製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| JP (2) | JPS62299901A (enrdf_load_stackoverflow) |
| DE (1) | DE3720451C2 (enrdf_load_stackoverflow) |
| FR (3) | FR2606164B1 (enrdf_load_stackoverflow) |
| GB (2) | GB2192733B (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015126322A (ja) * | 2013-12-26 | 2015-07-06 | 京セラ株式会社 | 電子機器 |
| WO2022045011A1 (ja) | 2020-08-27 | 2022-03-03 | Ａｇｃ株式会社 | 遠赤外線透過部材及び遠赤外線透過部材の製造方法 |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4907846A (en) * | 1987-11-20 | 1990-03-13 | Raytheon Company | Thick, impact resistant antireflection coatings for IR transparent optical elements |
| JP2929779B2 (ja) * | 1991-02-15 | 1999-08-03 | トヨタ自動車株式会社 | 炭素被膜付撥水ガラス |
| DE4303975A1 (de) * | 1993-02-11 | 1994-08-18 | Heidenhain Gmbh Dr Johannes | Teilungsträger |
| FR2731806B1 (fr) * | 1994-03-17 | 1998-03-06 | Lg Electronics Inc | Couche antireflechissante pour un dispositif d'affichage |
| KR0176767B1 (ko) * | 1995-03-17 | 1999-05-01 | 구자홍 | 다이아몬드상 탄소 박막의 반사 방지 층을 갖는 액정 표시 장치 |
| US6700699B1 (en) * | 2002-12-13 | 2004-03-02 | Raytheon Company | Dual color anti-reflection coating |
| US20120038975A1 (en) * | 2010-08-10 | 2012-02-16 | Fluke Corporation | Infrared imaging device with a coated optical lens |
| US9575216B2 (en) | 2011-05-24 | 2017-02-21 | National Institute Of Advanced Industrial Science And Technology | Infrared-transmitting film, method for producing infrared-transmitting film, infrared optical component, and infrared device |
| DE112015004470B4 (de) | 2014-09-30 | 2018-08-23 | Fujifilm Corporation | Antireflexfilm, Linse und Abbildungsvorrichtung |
| US11513072B2 (en) | 2021-03-12 | 2022-11-29 | Raytheon Company | Ablation sensor with optical measurement |
| US11880018B2 (en) * | 2021-03-12 | 2024-01-23 | Raytheon Company | Optical window with abrasion tolerance |
| RU2759509C1 (ru) * | 2021-06-07 | 2021-11-15 | Общество с ограниченной ответственностью «Микролазер» (ООО «Микролазер») | Способ создания твердой иммерсионной среды для наблюдения внутренней структуры прозрачных объектов с высоким показателем преломления |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56106202A (en) * | 1980-01-29 | 1981-08-24 | Tokyo Optical Co Ltd | Infrared reflection preventing film |
| JPS60144702A (ja) * | 1984-01-06 | 1985-07-31 | Toray Ind Inc | 反射防止性光学素子 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3432225A (en) * | 1964-05-04 | 1969-03-11 | Optical Coating Laboratory Inc | Antireflection coating and assembly having synthesized layer of index of refraction |
| US4264140A (en) * | 1977-02-14 | 1981-04-28 | Halm Instrument Co., Inc. | Low reflection coatings for windows |
| US4114983A (en) * | 1977-02-18 | 1978-09-19 | Minnesota Mining And Manufacturing Company | Polymeric optical element having antireflecting surface |
| US4168113A (en) * | 1977-07-05 | 1979-09-18 | American Optical Corporation | Glass lens with ion-exchanged antireflection coating and process for manufacture thereof |
| GB1588370A (en) * | 1978-05-11 | 1981-04-23 | Standard Telephones Cables Ltd | Infra-red transmitting elements |
| US4390595A (en) * | 1979-10-25 | 1983-06-28 | Hughes Aircraft Company | Environmentally protected IR windows |
| US4248909A (en) * | 1979-11-19 | 1981-02-03 | The Aerospace Corporation | Chaoite coating process |
| JPS56138701A (en) * | 1980-03-31 | 1981-10-29 | Minolta Camera Co Ltd | Antireflection film |
| DE3175345D1 (en) * | 1980-08-21 | 1986-10-23 | Nat Res Dev | Coating insulating materials by glow discharge |
| CH658522A5 (de) * | 1982-03-01 | 1986-11-14 | Balzers Hochvakuum | Optisches element. |
| GB2165266B (en) * | 1982-10-12 | 1987-09-23 | Nat Res Dev | Infra red transparent optical components |
| US4590117A (en) * | 1983-03-10 | 1986-05-20 | Toray Industries, Inc. | Transparent material having antireflective coating |
| DE3410502C2 (de) * | 1983-09-14 | 1985-12-19 | Dornier System Gmbh, 7990 Friedrichshafen | Regen-Erosionsschutz |
| DE3421739C2 (de) * | 1984-06-12 | 1987-01-02 | Battelle-Institut E.V., 6000 Frankfurt | Verfahren zur Herstellung von diamantartigen Kohlenstoffschichten |
-
1987
- 1987-06-15 GB GB8713905A patent/GB2192733B/en not_active Expired - Lifetime
- 1987-06-17 FR FR878708479A patent/FR2606164B1/fr not_active Expired - Fee Related
- 1987-06-18 JP JP62152396A patent/JPS62299901A/ja active Granted
- 1987-06-19 DE DE3720451A patent/DE3720451C2/de not_active Expired - Lifetime
- 1987-10-26 FR FR878714771A patent/FR2605417B1/fr not_active Expired - Lifetime
- 1987-10-26 FR FR878714772A patent/FR2606165B1/fr not_active Expired - Lifetime
-
1989
- 1989-12-07 GB GB8927705A patent/GB2225449B/en not_active Expired - Lifetime
-
1991
- 1991-09-18 JP JP3267188A patent/JPH0682164B2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56106202A (en) * | 1980-01-29 | 1981-08-24 | Tokyo Optical Co Ltd | Infrared reflection preventing film |
| JPS60144702A (ja) * | 1984-01-06 | 1985-07-31 | Toray Ind Inc | 反射防止性光学素子 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015126322A (ja) * | 2013-12-26 | 2015-07-06 | 京セラ株式会社 | 電子機器 |
| WO2022045011A1 (ja) | 2020-08-27 | 2022-03-03 | Ａｇｃ株式会社 | 遠赤外線透過部材及び遠赤外線透過部材の製造方法 |
| US12265202B2 (en) | 2020-08-27 | 2025-04-01 | AGC Inc. | Far-infrared ray transmission member and method for manufacturing far-infrared ray transmission member |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3720451C2 (de) | 1995-06-08 |
| GB2192733A (en) | 1988-01-20 |
| FR2606164A1 (fr) | 1988-05-06 |
| GB2225449A (en) | 1990-05-30 |
| GB2225449B (en) | 1991-02-06 |
| JPH0682164B2 (ja) | 1994-10-19 |
| DE3720451A1 (de) | 1988-01-28 |
| GB2192733B (en) | 1991-02-06 |
| FR2606165B1 (fr) | 1991-11-22 |
| FR2606165A1 (fr) | 1988-05-06 |
| JPH04362901A (ja) | 1992-12-15 |
| JPH0578001B2 (enrdf_load_stackoverflow) | 1993-10-27 |
| GB8927705D0 (en) | 1990-02-07 |
| FR2606164B1 (fr) | 1991-11-22 |
| FR2605417A1 (fr) | 1988-04-22 |
| GB8713905D0 (en) | 1987-07-22 |
| FR2605417B1 (fr) | 1991-11-22 |
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