JPS62297291A - 砒化ガリウム単結晶引き上げ装置 - Google Patents

砒化ガリウム単結晶引き上げ装置

Info

Publication number
JPS62297291A
JPS62297291A JP14034286A JP14034286A JPS62297291A JP S62297291 A JPS62297291 A JP S62297291A JP 14034286 A JP14034286 A JP 14034286A JP 14034286 A JP14034286 A JP 14034286A JP S62297291 A JPS62297291 A JP S62297291A
Authority
JP
Japan
Prior art keywords
inner container
collar
sealed
vessel
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14034286A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0364477B2 (enExample
Inventor
Koichi Sasa
佐々　紘一
Kenji Tomizawa
冨沢　憲治
Junichi Nishizawa
潤一 西澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Science and Technology Agency
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Research Development Corp of Japan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp, Research Development Corp of Japan filed Critical Mitsubishi Metal Corp
Priority to JP14034286A priority Critical patent/JPS62297291A/ja
Publication of JPS62297291A publication Critical patent/JPS62297291A/ja
Publication of JPH0364477B2 publication Critical patent/JPH0364477B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP14034286A 1986-06-18 1986-06-18 砒化ガリウム単結晶引き上げ装置 Granted JPS62297291A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14034286A JPS62297291A (ja) 1986-06-18 1986-06-18 砒化ガリウム単結晶引き上げ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14034286A JPS62297291A (ja) 1986-06-18 1986-06-18 砒化ガリウム単結晶引き上げ装置

Publications (2)

Publication Number Publication Date
JPS62297291A true JPS62297291A (ja) 1987-12-24
JPH0364477B2 JPH0364477B2 (enExample) 1991-10-07

Family

ID=15266599

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14034286A Granted JPS62297291A (ja) 1986-06-18 1986-06-18 砒化ガリウム単結晶引き上げ装置

Country Status (1)

Country Link
JP (1) JPS62297291A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03237089A (ja) * 1990-02-13 1991-10-22 Nippon Mining Co Ltd 単結晶成長装置
JP2020517819A (ja) * 2017-04-11 2020-06-18 バイオトロニック アクチェンゲゼルシャフト 精製された、特に高純度のマグネシウムを製造するための装置および方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60255692A (ja) * 1984-05-31 1985-12-17 Res Dev Corp Of Japan 高解離圧化合物半導体単結晶引き上げ装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60255692A (ja) * 1984-05-31 1985-12-17 Res Dev Corp Of Japan 高解離圧化合物半導体単結晶引き上げ装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03237089A (ja) * 1990-02-13 1991-10-22 Nippon Mining Co Ltd 単結晶成長装置
JP2020517819A (ja) * 2017-04-11 2020-06-18 バイオトロニック アクチェンゲゼルシャフト 精製された、特に高純度のマグネシウムを製造するための装置および方法

Also Published As

Publication number Publication date
JPH0364477B2 (enExample) 1991-10-07

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