JPS62295404A - Seperconductive coil - Google Patents

Abstract

PURPOSE:To enhance the density of a current in a superconductive coil by stacking a plurality of plates in which superconductive films are formed in a coil shape on an electrically insulating substrate in many stages, and electrically connecting among plates. CONSTITUTION:An electrically insulating substrate la is made of a polyimide resin film or ceramics, such as alumina or silicon carbide. Since the ceramic substrate has a large thermal conductivity even at low temperature, the substrate has a role as a heat sink plate. The substrate 1 is formed in thickness of 0.05-1mm, a spiral superconductive film 2 is deposited of plated on one side surface to form the film on the whole surface, and an unnecessary part is removed by etching. Grooves 3 of 0.02-0.5mm thick is formed in a latticelike state on the rear surface of the substrate 1 as a passage of liquid helium or evaporated helium gas of refrigerant. Similar substrates 1b-1n are stacked and clamped with bolts 5 and nuts 6. After the substrates are alternately connected therebetween by inner and outer peripheral side terminals 7a, 8a, the entirety is then heattreated as required. Thus, a superconductive coil having small size and high current density can be obtained.

Description

Detailed Description of the Invention 3. Detailed Description of the Invention [Field of Industrial Application] The present invention relates to a cylindrical superconducting coil, particularly a superconducting coil characterized by small size and high performance.

[Prior art]

Conventionally, large superconducting coils were manufactured using the Special Publication No. 59-28042.
As described in the above publication, it is known that a holding member is provided with a coil groove, and a superconducting material is placed in the coil groove through a spacing member.

[Problem that the invention seeks to solve]

However, applying this method to a small coil whose superconducting wire has a diameter of about 1 mm or less is difficult, and there are also problems in that it is difficult to obtain a high effective current density due to space.

An object of the present invention is to provide a small superconducting coil that is easy to manufacture and capable of achieving high current density.

[Means for solving problems]

That is, the present invention is characterized by a structure in which superconducting members are formed in a coil shape on an electrically insulating substrate, stacked in multiple stages, and electrically connected.

[Effect]

The above configuration makes it possible to easily and stably obtain a small superconducting coil.

〔Example〕

Embodiments of the present invention will be described below with reference to FIG.

1a is an electrically insulating substrate made of, for example, a polyimide resin film or ceramics such as alumina or silicon carbide. Ceramic substrates have high thermal conductivity even at low temperatures, so they also serve as a heat sink. This substrate 1 has a thickness of 0.
05 to 1■, and a spiral superconducting film 2 is attached to one side by vapor deposition or plating. After forming a superconducting film on the entire surface,
Unnecessary parts may be removed by etching. Grooves 3 with a depth of 0.02 to 0.5 μl are provided in a lattice pattern on the back surface of the substrate 1a. These grooves 3 are used as passages for the coolant liquid helium or vaporized helium gas, but there are no grooves 3. Good too. Similar board 1b
, . . , 1n are stacked, and the bolts 5 and nuts 6 are tightened using the bolt holes 4 made on the inner and outer circumferential sides. Each board is alternately connected using the inner peripheral side terminal 7a and the outer peripheral side terminal 8a. After forming in this manner, the entire structure may be heat treated if necessary. FIG. 2 shows the substrate 1 shown in FIG.
In the partial cross-sectional view of a, a substrate 11 having a groove 10 on the back side,
A superconducting material 12 is deposited to a thickness of 0.005 to 0.2 nm,
Furthermore, an insulating coating 13 is applied. The superconducting member may be made of a single element or a combination of a plurality of elements, and a portion of the total thickness may be conductive.

FIG. 3 shows that the superconducting film attached to the substrate 11 has a thickness of 0.
Consisting of bands 14a to 14d subdivided into bands 14a to 14d with a width of 0.05mm or less and a width of 0.05mm+, each band has a width of 0.005mo+
Hereinafter, adjacent band groups 15a, -.

15d is insulated by 0.05 mm or less. this is,
It is said to have the effect of reducing electrical instability that occurs in superconducting films. This corresponds to so-called ultra-thin wires.

In FIG. 4, a low electrical resistance material 16 such as copper or aluminum is pasted on a substrate 11, and after a superconducting material 12 is attached, unnecessary parts are removed by etching or a similar method. This low electrical resistance material 16 can contribute to stabilizing the superconducting material 12.

FIG. 5 shows a situation in which the substrates 1a and lb are connected between the outer terminals 8a and 8b. A superconducting material is also applied to the side surfaces 17a and 17b of the hole penetrated through the substrate in advance,
Insert the connecting pin 18 and braze with solder 19 or the like. Alternatively, a bottle 18 made of superconducting material and superconducting materials 17a and 17b
Alternatively, a short circuit may be created using only the superconducting material by reacting with the superconducting material.

In FIG. 6, a heat storage material 22 is embedded in a groove formed in a substrate 21 to reduce temperature fluctuations. Furthermore, another material 24 is attached on top of the material 23, and a superconducting material is formed at the interface by heat treatment. For example, if 23 is niobium and 24 is tin, NbaSn is formed as a superconducting compound.

According to the method of this embodiment as described above, superconducting coils with high critical temperatures, such as Nba (AQ-Go), which has been difficult to make into wires, can be easily made.

Methods such as vapor deposition, plating, and etching can be used in the same manner as in semiconductor manufacturing, and mass production is also possible.

Since the superconducting material is fixed to the substrate, a stable coil can be obtained without any movement like winding.
This is the same as the example in Japanese Patent Publication No. 59-28042.

〔Effect of the invention〕

As described above, according to the present invention, the thickness of the superconducting material and the substrate can be reduced, and a compact superconducting coil with high current density can be obtained. Further, as a secondary effect, if a heat-resistant substrate is used, the heat treatment temperature can be increased, and a coil with a high critical temperature can be obtained.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing one embodiment of the present invention, and FIG. 2 is a perspective view showing one embodiment of the present invention.
AA sectional view, FIGS. 3 and 4 are sectional views showing other embodiments of the present invention, FIG. 5 is a BB sectional view of FIG. 1, and FIG. 6 is a sectional view showing other embodiments of the present invention. FIG. 3 is a partial cross-sectional view corresponding to FIG. 2 showing an embodiment of the present invention. 11.21...Substrate, 2,12,14,15...Superconducting material, 13...Insulating coating. ,,,:'Si Fig. 1 Fig. Z Fig. 3 Country No. 5 1st man! ''' ``21...
Basic hat seven openings

Claims (1)

[Claims] 1. A superconducting coil characterized in that a plurality of plates each having a coil-shaped superconducting film formed on an electrically insulating substrate are stacked in multiple stages, and the plates are electrically connected.