JPS62294948A - オ−ジェ電子分光スペクトルの測定方法 - Google Patents
オ−ジェ電子分光スペクトルの測定方法Info
- Publication number
- JPS62294948A JPS62294948A JP62118680A JP11868087A JPS62294948A JP S62294948 A JPS62294948 A JP S62294948A JP 62118680 A JP62118680 A JP 62118680A JP 11868087 A JP11868087 A JP 11868087A JP S62294948 A JPS62294948 A JP S62294948A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- voltage
- electron
- auger electron
- detected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001228 spectrum Methods 0.000 title claims abstract description 17
- 238000005259 measurement Methods 0.000 title description 2
- 238000000682 scanning probe acoustic microscopy Methods 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 10
- 238000000691 measurement method Methods 0.000 claims description 7
- 238000004458 analytical method Methods 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 abstract description 19
- 239000004020 conductor Substances 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 6
- 108010083687 Ion Pumps Proteins 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000004611 spectroscopical analysis Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62118680A JPS62294948A (ja) | 1987-05-14 | 1987-05-14 | オ−ジェ電子分光スペクトルの測定方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62118680A JPS62294948A (ja) | 1987-05-14 | 1987-05-14 | オ−ジェ電子分光スペクトルの測定方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP491078A Division JPS54139593A (en) | 1978-01-19 | 1978-01-19 | Measuring method of auger electron spectral spectra |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62294948A true JPS62294948A (ja) | 1987-12-22 |
| JPH0122577B2 JPH0122577B2 (enrdf_load_stackoverflow) | 1989-04-27 |
Family
ID=14742544
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62118680A Granted JPS62294948A (ja) | 1987-05-14 | 1987-05-14 | オ−ジェ電子分光スペクトルの測定方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62294948A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01242945A (ja) * | 1988-03-25 | 1989-09-27 | Nec Corp | 螢光ｘ線分析装置 |
-
1987
- 1987-05-14 JP JP62118680A patent/JPS62294948A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01242945A (ja) * | 1988-03-25 | 1989-09-27 | Nec Corp | 螢光ｘ線分析装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0122577B2 (enrdf_load_stackoverflow) | 1989-04-27 |
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