JPS62293109A - Inspecting instrument for shape of electronic parts - Google Patents

Abstract

PURPOSE:To automatically inspect even a defect which causes the area variation of an electronic parts like cracking by tracking information regarding the edge of the parts among pieces of image information on the plane shape of the parts and comparing it with edge limit information. CONSTITUTION:The image of the plane shape of the electronic parts 1 to be inspected is picked up 2, A/D-converted, and stored in a memory 3. An edge tracking circuit 4 tracks an edge information line 11 read out of the memory 3 by using a detection operator. At this time, even at the position of the cracking 12 tracking is carried up to the inside along the edge of cracking. A deficit part 13 is the same. Further, edge information 10 on the conforming article limit value of the parts 1 is set in a limiting edge information setting means 5 previously. An edge position inspecting and deciding circuit 6 compares the output of the circuit 4 with the output of a setting means 5 successively. In this case, the information line 11 extends beyond a limit line 10 at the cracking 12 and deficit part 13, so it is decided that the parts 1 is defective. The decision result can be known through a warning circuit and a conveying device 8 is used to perform the automatic inspection while parts 1 are changed one after another.

Description

[Detailed description of the invention] 3. Detailed description of the invention [Summary] When it is determined that there is a crack in the edge information about an electronic component and that the size of the crack exceeds a standard value, it is determined that the product is defective. This is a device that automatically and accurately inspects the shape of such electronic components.

[Industrial Field of Application] The present invention relates to an apparatus that can automatically inspect electronic components such as semiconductor integrated circuit chips for cracks and defects at a relatively early stage of the manufacturing process.

In order to inspect rectangular parallelepiped chip parts among electronic parts for cracks and chips when viewed from a plane, there is a demand for accurate automatic inspection by machines in addition to visual inspection by inspectors. It's here.

[Prior Art] It has been indispensable in the conventional work process for inspectors to visually inspect rectangular parallelepiped chip components. Fourth
The figure shows the state of illumination in the inspection of chip components.In addition to irradiating the chip component 1 with light beams from all four directions in the horizontal direction, illumination is applied to the entire circumference from diagonally below or diagonally above, and visual inspection is performed from above. Perform inspection. Such illumination light makes the chipped area more obvious. It is also easier to spot cracks. In addition to visual inspection by the inspector, mechanical operations can be performed, for example, by pattern matching. In this case, the reference pattern is stored in the memory in advance so as to define at least the range surrounded by the border line. Next, the part to be inspected is examined and compared with the data read from the memory as area data. If they match with an error within a predetermined value, it is determined to be a pass.

[Problems to be Solved by the Invention] Visual inspection by inspectors requires skill, and if the inspector continues to work for a long time, he or she is likely to miss something due to fatigue. Furthermore, it is inevitable that individual differences will occur. On the other hand, mechanical inspection allows the inspection standards to be constant, but if there are cracks from the surface of the part toward the inside, it may be judged as non-defective.

SUMMARY OF THE INVENTION An object of the present invention is to improve the above-mentioned drawbacks and to provide an apparatus that can automatically inspect defects such as cracks that do not cause changes in the area of parts.

[Means for Solving the Problems] FIG. 1 is a block diagram showing the basic configuration of the present invention. In FIG. 1, reference numeral 1 indicates an electronic component to be inspected, which is viewed in cross section. 2 is an imaging device, for example, an industrial TV; 3 is an image memory that stores image information regarding the planar shape of the electronic component to be inspected obtained by the imaging device 2; 4 is an edge tracking circuit that reads out from the image memory 2; Among the information collected, information on the edges of electronic components is sequentially tracked to obtain an edge frame, 5
6 is an edge position detection/judgment circuit that compares the output of the edge tracking circuit 4 with the output of the edge limit information setting means 5, and determines whether the edge frame of the part to be inspected is at the edge limit. Determine whether or not the person enters or exits in excess of the specified limit.

An edge writing circuit 7 writes standard edge information to the image memory 3 and prepares for checking the operation of the edge tracking circuit 4. Reference numeral 8 indicates an electronic component transfer device.

[Operation] FIG. 2 shows a plan view of the electronic component to be inspected, and the operation of the apparatus shown in FIG. 1 will be explained with reference to FIG. In FIG. 2, reference numeral 10 indicates an edge limit line, and reference numeral 11 indicates a line of edge information read from the image memory. 12 indicates a cracked portion, and 13 indicates a defective portion. The imaging device 2 shown in FIG. 1 captures an image of the planar shape of the electronic component 1 to be inspected, and stores it in the image memory 3 after A/D conversion, for example. Next, when the edge information line 11 read out from the image memory 3 is determined in a counterclockwise direction from the lower right corner, the edge tracking circuit 4 of FIG. 1 tracks the edge using a known edge detection operator.

In crack repair work 2, the edge has penetrated into the interior, so it is traced as an edge. The same applies to the defective portion 13. Further, edge information 10 indicating the non-defective limit value of the electronic component 1 is set in advance in the means 5. The edge position inspection/judgment circuit 6 sequentially compares the output of the edge tracking circuit 4 and the output of the means 5. Edge information 1 at cracked part 12 and missing part 13
1 is in and out beyond the edge limit information 10, so it can be determined that the electronic component 1 is a defective product. The judgment result can be notified by an alarm circuit, and furthermore, the electronic parts 1 to be tested can be automatically tested while being replaced one after another using the transfer device 8.

Embodiment FIG. 3 shows an operator used in an edge tracking circuit as an embodiment of the present invention. In the pixel memory 3 in FIG. 1, vertical and horizontal addresses are assigned to electronic components, image data at each address is checked, and if there is a signal change point, it is determined that it is an edge, and a large amount of such data is stored.

Now, if the operator Pn shown in FIG. 3 represents the data of the operating address of the edge tracking circuit, then P is the address that was processed one step ago. When detecting that there is a signal change in the data at P'n and determining that it is an "edge", the address is notified to a central processing unit (not shown).

Then, the next tracking process starts from ◯ in FIG.

When it is determined that the part (2) is an edge based on the data in (2), it is notified that it is an edge, and Pn is moved to that location and processed in the same way as described above. When ■ is not an edge■
Move to and determine whether ■ is an edge. In this way, the edge frame of the electronic component can be traced by repeating the process of sequentially moving to the first address found to be an edge. Using the operator shown in FIG. 3, the edge border can be traced clockwise with respect to FIG.

C. Effects of the Invention In this way, according to the present invention, even cracks that could not be discovered through visual inspection by a worker can be tracked by the edge tracking circuit and accurately discovered by comparing them with edge limit information. . Furthermore, inspection can be easily automated by using an image memory and a device for transporting parts to be inspected.

[Brief explanation of drawings]

Fig. 1 is a diagram showing the basic configuration of the present invention, Figs. 2 and 3 are diagrams for explaining the operation of Fig. 1, and Fig. 4 is an explanatory diagram of illumination used when inspecting the shape of electronic components. be. 1--Electronic components 2-Imaging device 3--Image memory 4-Edge tracking circuit 5-Edge limit information setting means 6--Edge position inspection/judgment circuit 10-Edge limit line 11--Edge information line 12 - Crack area Patent applicant Fujitsu Ltd. agent Patent attorney Eisuke Suzuki Figure 1 Figure 2 Edge source and official figure 3

Claims (1)

[Claims] A device (2) for capturing an image of the planar shape of an electronic component (1), an image memory (3) for storing the obtained image information, and an image of the electronic component read from the image memory (3). A circuit (4) for sequentially tracking edge information; and means (4) for setting edge limit information of the electronic component (1).
5); and a circuit (6) for inspecting and determining edge positions based on edge tracking information and edge limit information.