JPS62293107A - 微小溝深さ測定装置 - Google Patents

微小溝深さ測定装置

Info

Publication number
JPS62293107A
JPS62293107A JP13614986A JP13614986A JPS62293107A JP S62293107 A JPS62293107 A JP S62293107A JP 13614986 A JP13614986 A JP 13614986A JP 13614986 A JP13614986 A JP 13614986A JP S62293107 A JPS62293107 A JP S62293107A
Authority
JP
Japan
Prior art keywords
light
lens
substrate
reflected
michelson interferometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13614986A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0569361B2 (enrdf_load_stackoverflow
Inventor
Kazumasa Takada
和正 高田
Shigeyuki Tsurumi
重行 鶴見
Juichi Noda
野田　壽一
Ban Nakajima
中島　蕃
Kazushige Minegishi
峯岸　一茂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP13614986A priority Critical patent/JPS62293107A/ja
Publication of JPS62293107A publication Critical patent/JPS62293107A/ja
Publication of JPH0569361B2 publication Critical patent/JPH0569361B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP13614986A 1986-06-13 1986-06-13 微小溝深さ測定装置 Granted JPS62293107A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13614986A JPS62293107A (ja) 1986-06-13 1986-06-13 微小溝深さ測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13614986A JPS62293107A (ja) 1986-06-13 1986-06-13 微小溝深さ測定装置

Publications (2)

Publication Number Publication Date
JPS62293107A true JPS62293107A (ja) 1987-12-19
JPH0569361B2 JPH0569361B2 (enrdf_load_stackoverflow) 1993-09-30

Family

ID=15168454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13614986A Granted JPS62293107A (ja) 1986-06-13 1986-06-13 微小溝深さ測定装置

Country Status (1)

Country Link
JP (1) JPS62293107A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63193003A (ja) * 1987-02-06 1988-08-10 Japan Spectroscopic Co 凹部深さ・膜厚測定装置
JP2011518312A (ja) * 2007-12-14 2011-06-23 インテクプラス カンパニー、リミテッド 立体形状測定装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63193003A (ja) * 1987-02-06 1988-08-10 Japan Spectroscopic Co 凹部深さ・膜厚測定装置
JP2011518312A (ja) * 2007-12-14 2011-06-23 インテクプラス カンパニー、リミテッド 立体形状測定装置

Also Published As

Publication number Publication date
JPH0569361B2 (enrdf_load_stackoverflow) 1993-09-30

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term