JPH0569361B2 - - Google Patents
Info
- Publication number
- JPH0569361B2 JPH0569361B2 JP13614986A JP13614986A JPH0569361B2 JP H0569361 B2 JPH0569361 B2 JP H0569361B2 JP 13614986 A JP13614986 A JP 13614986A JP 13614986 A JP13614986 A JP 13614986A JP H0569361 B2 JPH0569361 B2 JP H0569361B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- substrate
- reflected
- lens
- half mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005259 measurement Methods 0.000 claims description 13
- 239000013307 optical fiber Substances 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 4
- 239000000758 substrate Substances 0.000 description 36
- 230000004907 flux Effects 0.000 description 18
- 238000010586 diagram Methods 0.000 description 14
- 239000003990 capacitor Substances 0.000 description 7
- 230000001427 coherent effect Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000001066 destructive effect Effects 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13614986A JPS62293107A (ja) | 1986-06-13 | 1986-06-13 | 微小溝深さ測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13614986A JPS62293107A (ja) | 1986-06-13 | 1986-06-13 | 微小溝深さ測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62293107A JPS62293107A (ja) | 1987-12-19 |
| JPH0569361B2 true JPH0569361B2 (enrdf_load_stackoverflow) | 1993-09-30 |
Family
ID=15168454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13614986A Granted JPS62293107A (ja) | 1986-06-13 | 1986-06-13 | 微小溝深さ測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62293107A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2533514B2 (ja) * | 1987-02-06 | 1996-09-11 | 日本分光株式会社 | 凹部深さ・膜厚測定装置 |
| KR100939538B1 (ko) * | 2007-12-14 | 2010-02-03 | (주) 인텍플러스 | 입체 형상 측정 장치 |
-
1986
- 1986-06-13 JP JP13614986A patent/JPS62293107A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62293107A (ja) | 1987-12-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |