JPS62291123A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS62291123A
JPS62291123A JP61133860A JP13386086A JPS62291123A JP S62291123 A JPS62291123 A JP S62291123A JP 61133860 A JP61133860 A JP 61133860A JP 13386086 A JP13386086 A JP 13386086A JP S62291123 A JPS62291123 A JP S62291123A
Authority
JP
Japan
Prior art keywords
copper
lead wire
semiconductor device
wire
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61133860A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0478173B2 (enExample
Inventor
Shiro Kobayashi
史朗 小林
Masahiko Ito
雅彦 伊藤
Shigetoshi Kazama
風間　成年
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP61133860A priority Critical patent/JPS62291123A/ja
Publication of JPS62291123A publication Critical patent/JPS62291123A/ja
Publication of JPH0478173B2 publication Critical patent/JPH0478173B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/015—Manufacture or treatment of bond wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/075—Connecting or disconnecting of bond wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/521—Structures or relative sizes of bond wires
    • H10W72/522—Multilayered bond wires, e.g. having a coating concentric around a core
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/551—Materials of bond wires
    • H10W72/552—Materials of bond wires comprising metals or metalloids, e.g. silver
    • H10W72/5525—Materials of bond wires comprising metals or metalloids, e.g. silver comprising copper [Cu]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/551—Materials of bond wires
    • H10W72/553—Materials of bond wires not comprising solid metals or solid metalloids, e.g. polymers, ceramics or liquids
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/551—Materials of bond wires
    • H10W72/555—Materials of bond wires of outermost layers of multilayered bond wires, e.g. material of a coating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/756—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked lead frame, conducting package substrate or heat sink

Landscapes

  • Wire Bonding (AREA)
JP61133860A 1986-06-11 1986-06-11 半導体装置の製造方法 Granted JPS62291123A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61133860A JPS62291123A (ja) 1986-06-11 1986-06-11 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61133860A JPS62291123A (ja) 1986-06-11 1986-06-11 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS62291123A true JPS62291123A (ja) 1987-12-17
JPH0478173B2 JPH0478173B2 (enExample) 1992-12-10

Family

ID=15114737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61133860A Granted JPS62291123A (ja) 1986-06-11 1986-06-11 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS62291123A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006196920A (ja) * 2003-04-16 2006-07-27 Shinko Electric Ind Co Ltd 導体基材、半導体装置及びそれらの製造方法
JP2008085319A (ja) * 2006-08-31 2008-04-10 Nippon Steel Materials Co Ltd 半導体装置用銅合金ボンディングワイヤ
DE102018107563A1 (de) * 2018-03-29 2019-10-02 Infineon Technologies Austria Ag Halbleitervorrichtung mit kupferstruktur

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60224255A (ja) * 1984-04-20 1985-11-08 Hitachi Cable Ltd ボンデイングワイヤ及びその製造方法
JPS6175554A (ja) * 1984-09-21 1986-04-17 Hitachi Ltd 半導体装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60224255A (ja) * 1984-04-20 1985-11-08 Hitachi Cable Ltd ボンデイングワイヤ及びその製造方法
JPS6175554A (ja) * 1984-09-21 1986-04-17 Hitachi Ltd 半導体装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006196920A (ja) * 2003-04-16 2006-07-27 Shinko Electric Ind Co Ltd 導体基材、半導体装置及びそれらの製造方法
JP2008085319A (ja) * 2006-08-31 2008-04-10 Nippon Steel Materials Co Ltd 半導体装置用銅合金ボンディングワイヤ
DE102018107563A1 (de) * 2018-03-29 2019-10-02 Infineon Technologies Austria Ag Halbleitervorrichtung mit kupferstruktur
US10937720B2 (en) 2018-03-29 2021-03-02 Infineon Technologies Austria Ag Semiconductor device with copper structure
DE102018107563B4 (de) 2018-03-29 2022-03-03 Infineon Technologies Austria Ag Halbleitervorrichtung mit kupferstruktur und verfahren zur herstellung einer halbleitervorrichung

Also Published As

Publication number Publication date
JPH0478173B2 (enExample) 1992-12-10

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