JPS62289704A - シアリング干渉コントラスト法段差測定装置 - Google Patents
シアリング干渉コントラスト法段差測定装置Info
- Publication number
- JPS62289704A JPS62289704A JP13445286A JP13445286A JPS62289704A JP S62289704 A JPS62289704 A JP S62289704A JP 13445286 A JP13445286 A JP 13445286A JP 13445286 A JP13445286 A JP 13445286A JP S62289704 A JPS62289704 A JP S62289704A
- Authority
- JP
- Japan
- Prior art keywords
- light
- phase
- intensity
- parallel
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010008 shearing Methods 0.000 title claims abstract description 11
- 238000000034 method Methods 0.000 title claims description 13
- 238000000926 separation method Methods 0.000 abstract description 2
- 230000004907 flux Effects 0.000 abstract 2
- 230000003287 optical effect Effects 0.000 description 9
- 238000005259 measurement Methods 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 4
- 239000010408 film Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910021532 Calcite Inorganic materials 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000005492 condensed matter physics Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010291 electrical method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13445286A JPS62289704A (ja) | 1986-06-10 | 1986-06-10 | シアリング干渉コントラスト法段差測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13445286A JPS62289704A (ja) | 1986-06-10 | 1986-06-10 | シアリング干渉コントラスト法段差測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62289704A true JPS62289704A (ja) | 1987-12-16 |
| JPH0445082B2 JPH0445082B2 (enrdf_load_stackoverflow) | 1992-07-23 |
Family
ID=15128672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13445286A Granted JPS62289704A (ja) | 1986-06-10 | 1986-06-10 | シアリング干渉コントラスト法段差測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62289704A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04500127A (ja) * | 1989-08-04 | 1992-01-09 | チャップマン インストルメンツ，インコーポレイテッド | 表面ならい盤の観察装置 |
| JPH07174546A (ja) * | 1993-06-30 | 1995-07-14 | Nec Corp | 膜厚測定方法 |
| US6078393A (en) * | 1996-09-04 | 2000-06-20 | Kabushiki Kaisha Toshiba | Phase shift mask inspection apparatus |
-
1986
- 1986-06-10 JP JP13445286A patent/JPS62289704A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04500127A (ja) * | 1989-08-04 | 1992-01-09 | チャップマン インストルメンツ，インコーポレイテッド | 表面ならい盤の観察装置 |
| JPH07174546A (ja) * | 1993-06-30 | 1995-07-14 | Nec Corp | 膜厚測定方法 |
| US6078393A (en) * | 1996-09-04 | 2000-06-20 | Kabushiki Kaisha Toshiba | Phase shift mask inspection apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0445082B2 (enrdf_load_stackoverflow) | 1992-07-23 |
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