JPS62289233A - シ−ト状物のプラズマ処理装置 - Google Patents

シ−ト状物のプラズマ処理装置

Info

Publication number
JPS62289233A
JPS62289233A JP13406786A JP13406786A JPS62289233A JP S62289233 A JPS62289233 A JP S62289233A JP 13406786 A JP13406786 A JP 13406786A JP 13406786 A JP13406786 A JP 13406786A JP S62289233 A JPS62289233 A JP S62289233A
Authority
JP
Japan
Prior art keywords
rotating shaft
discharge electrode
plasma
electrode
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13406786A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0475776B2 (Direct
Inventor
Motoyasu Koyama
小山　元靖
Hideaki Teraoka
寺岡　英朗
Takao Akagi
赤木　孝夫
Shinji Yamaguchi
新司 山口
Itsuki Sakamoto
逸樹 坂本
Akira Nanba
難波　明
Isao Okagaki
岡垣　勲
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kuraray Co Ltd
Original Assignee
Kuraray Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kuraray Co Ltd filed Critical Kuraray Co Ltd
Priority to JP13406786A priority Critical patent/JPS62289233A/ja
Priority to KR870004997A priority patent/KR880000215A/ko
Priority to US07/058,858 priority patent/US4803332A/en
Priority to CN87104097A priority patent/CN1015614B/zh
Priority to DE87108331T priority patent/DE3788160T2/de
Priority to EP87108331A priority patent/EP0249198B1/en
Publication of JPS62289233A publication Critical patent/JPS62289233A/ja
Publication of JPH0475776B2 publication Critical patent/JPH0475776B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP13406786A 1986-06-10 1986-06-10 シ−ト状物のプラズマ処理装置 Granted JPS62289233A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP13406786A JPS62289233A (ja) 1986-06-10 1986-06-10 シ−ト状物のプラズマ処理装置
KR870004997A KR880000215A (ko) 1986-06-10 1987-05-20 시이트(sheet)상 물체의 플라즈마 처리장치
US07/058,858 US4803332A (en) 1986-06-10 1987-06-05 Apparatus for plasma treatment of a sheet-like structure
CN87104097A CN1015614B (zh) 1986-06-10 1987-06-09 薄状物等离子体处理装置
DE87108331T DE3788160T2 (de) 1986-06-10 1987-06-10 Plasmabehandlungsvorrichtung.
EP87108331A EP0249198B1 (en) 1986-06-10 1987-06-10 Plasma treating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13406786A JPS62289233A (ja) 1986-06-10 1986-06-10 シ−ト状物のプラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS62289233A true JPS62289233A (ja) 1987-12-16
JPH0475776B2 JPH0475776B2 (Direct) 1992-12-01

Family

ID=15119600

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13406786A Granted JPS62289233A (ja) 1986-06-10 1986-06-10 シ−ト状物のプラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS62289233A (Direct)

Also Published As

Publication number Publication date
JPH0475776B2 (Direct) 1992-12-01

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees