JPH0475777B2 - - Google Patents
Info
- Publication number
- JPH0475777B2 JPH0475777B2 JP61143773A JP14377386A JPH0475777B2 JP H0475777 B2 JPH0475777 B2 JP H0475777B2 JP 61143773 A JP61143773 A JP 61143773A JP 14377386 A JP14377386 A JP 14377386A JP H0475777 B2 JPH0475777 B2 JP H0475777B2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum container
- rotating shaft
- sheet
- electrode
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Plasma Technology (AREA)
- Treatment Of Fiber Materials (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61143773A JPS631443A (ja) | 1986-06-19 | 1986-06-19 | シ−ト状物のプラズマ処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61143773A JPS631443A (ja) | 1986-06-19 | 1986-06-19 | シ−ト状物のプラズマ処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS631443A JPS631443A (ja) | 1988-01-06 |
| JPH0475777B2 true JPH0475777B2 (Direct) | 1992-12-01 |
Family
ID=15346683
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61143773A Granted JPS631443A (ja) | 1986-06-19 | 1986-06-19 | シ−ト状物のプラズマ処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS631443A (Direct) |
-
1986
- 1986-06-19 JP JP61143773A patent/JPS631443A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS631443A (ja) | 1988-01-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |