JPS6228874U - - Google Patents
Info
- Publication number
- JPS6228874U JPS6228874U JP11829485U JP11829485U JPS6228874U JP S6228874 U JPS6228874 U JP S6228874U JP 11829485 U JP11829485 U JP 11829485U JP 11829485 U JP11829485 U JP 11829485U JP S6228874 U JPS6228874 U JP S6228874U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- electrode
- bonded
- plasma cvd
- ceramic heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 claims description 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 238000009795 derivation Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11829485U JPH0454Y2 (zh) | 1985-07-31 | 1985-07-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11829485U JPH0454Y2 (zh) | 1985-07-31 | 1985-07-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6228874U true JPS6228874U (zh) | 1987-02-21 |
JPH0454Y2 JPH0454Y2 (zh) | 1992-01-06 |
Family
ID=31004613
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11829485U Expired JPH0454Y2 (zh) | 1985-07-31 | 1985-07-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0454Y2 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013508956A (ja) * | 2010-06-11 | 2013-03-07 | 深▲せん▼市創益科技発展有限公司 | シリコン系薄膜太陽電池のための可動治具 |
-
1985
- 1985-07-31 JP JP11829485U patent/JPH0454Y2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013508956A (ja) * | 2010-06-11 | 2013-03-07 | 深▲せん▼市創益科技発展有限公司 | シリコン系薄膜太陽電池のための可動治具 |
Also Published As
Publication number | Publication date |
---|---|
JPH0454Y2 (zh) | 1992-01-06 |
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