JPS6228874U - - Google Patents

Info

Publication number
JPS6228874U
JPS6228874U JP11829485U JP11829485U JPS6228874U JP S6228874 U JPS6228874 U JP S6228874U JP 11829485 U JP11829485 U JP 11829485U JP 11829485 U JP11829485 U JP 11829485U JP S6228874 U JPS6228874 U JP S6228874U
Authority
JP
Japan
Prior art keywords
plate
electrode
bonded
plasma cvd
ceramic heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11829485U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0454Y2 (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11829485U priority Critical patent/JPH0454Y2/ja
Publication of JPS6228874U publication Critical patent/JPS6228874U/ja
Application granted granted Critical
Publication of JPH0454Y2 publication Critical patent/JPH0454Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP11829485U 1985-07-31 1985-07-31 Expired JPH0454Y2 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11829485U JPH0454Y2 (zh) 1985-07-31 1985-07-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11829485U JPH0454Y2 (zh) 1985-07-31 1985-07-31

Publications (2)

Publication Number Publication Date
JPS6228874U true JPS6228874U (zh) 1987-02-21
JPH0454Y2 JPH0454Y2 (zh) 1992-01-06

Family

ID=31004613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11829485U Expired JPH0454Y2 (zh) 1985-07-31 1985-07-31

Country Status (1)

Country Link
JP (1) JPH0454Y2 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013508956A (ja) * 2010-06-11 2013-03-07 深▲せん▼市創益科技発展有限公司 シリコン系薄膜太陽電池のための可動治具

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013508956A (ja) * 2010-06-11 2013-03-07 深▲せん▼市創益科技発展有限公司 シリコン系薄膜太陽電池のための可動治具

Also Published As

Publication number Publication date
JPH0454Y2 (zh) 1992-01-06

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