JPS6237200U - - Google Patents
Info
- Publication number
- JPS6237200U JPS6237200U JP12854485U JP12854485U JPS6237200U JP S6237200 U JPS6237200 U JP S6237200U JP 12854485 U JP12854485 U JP 12854485U JP 12854485 U JP12854485 U JP 12854485U JP S6237200 U JPS6237200 U JP S6237200U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- gas introduction
- gas
- introduction tube
- electrode plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009413 insulation Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12854485U JPH0528720Y2 (zh) | 1985-08-22 | 1985-08-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12854485U JPH0528720Y2 (zh) | 1985-08-22 | 1985-08-22 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6237200U true JPS6237200U (zh) | 1987-03-05 |
JPH0528720Y2 JPH0528720Y2 (zh) | 1993-07-23 |
Family
ID=31024312
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12854485U Expired - Lifetime JPH0528720Y2 (zh) | 1985-08-22 | 1985-08-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0528720Y2 (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04182997A (ja) * | 1990-11-16 | 1992-06-30 | Inter Nitsukusu Kk | 高速サンプル・ホールド回路 |
JP2006100305A (ja) * | 2004-09-28 | 2006-04-13 | Asm Japan Kk | プラズマ処理装置 |
-
1985
- 1985-08-22 JP JP12854485U patent/JPH0528720Y2/ja not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04182997A (ja) * | 1990-11-16 | 1992-06-30 | Inter Nitsukusu Kk | 高速サンプル・ホールド回路 |
JP2006100305A (ja) * | 2004-09-28 | 2006-04-13 | Asm Japan Kk | プラズマ処理装置 |
JP4572100B2 (ja) * | 2004-09-28 | 2010-10-27 | 日本エー・エス・エム株式会社 | プラズマ処理装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0528720Y2 (zh) | 1993-07-23 |